The invention relates to a forming method for composite
electroplating of an MEMS (Micro Electro
Mechanical System) probe. Structural patterns of a needle tip or / and a needle body are / is photoetched through a micro-electro-mechanical process, the needle tip or / and the needle body is / are formed through
electroplating of a composite plating solution after pretreatment, the composite plating solution is obtained by mixing a
metal base solution and a turbid liquid, the
metal base solution is a
nickel base solution and / or a
rhodium base solution, and the turbid liquid is a
nickel base solution and / or a
rhodium base solution. The suspension is formed by suspending nano-
powder in water through a dispersing agent. Compared with the prior art, the technology provided by the invention has the following advantages that the MEMS process technology is combined with the composite plating solution to be used for various probe structures, and the performance of the
prepared material is greatly improved compared with that of a pure
metal coating; the composite plating solution prepared from the plating solution and the second-phase particles is high in stability, and the
electroplating process is easy to operate; the
nickel-based composite plating solution can be used for obtaining a main body material with higher
hardness, better
wear resistance and better flexural property; the
rhodium-based composite plating solution is used for preparing a needle point material, has higher
hardness and
wear resistance, and improves the
brittle fracture problem.