Method For Purifying Nitrogen Trifluoride

a technology of nitrogen trifluoride and purification method, which is applied in the direction of distillation separation, separation process, chemistry apparatus and processes, etc., can solve the problem of difficult to remove carbon tetrafluoride from nitrogen trifluoride by a conventional industrial distillation or absorption process, and achieve the effect of effective and economical extraction

Active Publication Date: 2009-06-04
SK SPECIALTY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0007]In accordance with the method of the present invention, ultra-high purity nitrogen trifluoride

Problems solved by technology

However, as the boiling points of nitrogen trifluoride and carbon tetrafluoride are very similar, −129° C. and −128° C., respectively, differing by a mere 1° C., and the molecular sizes a

Method used

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Examples

Experimental program
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Effect test

example 1

[0015]Liquid nitrogen trifluoride containing 47 ppm of carbon tetrafluoride was fed at a rate of 4.3 kg / hr to a 50 L vessel-type reactor (SUS316L) which was pressurized to 38 atm, and was allowed to boil at −45° C. to remove carbon tetrafluoride by vaporization, while keeping the liquid surface at the 50% level of the reactor volume and collecting refined nitrogen trifluoride at a rate of 4.1 kg / hr. The carbon tetrafluoride content of the refined nitrogen trifluoride thus obtained was 5.8 ppm.

example 2

[0016]Liquid nitrogen trifluoride containing 12 ppm of carbon tetrafluoride was fed at a rate of 5.7 kg / hr to a 50 L vessel-type reactor which was pressurized to 42 atm, and was allowed to boil at −39° C. to remove carbon tetrafluoride by vaporization, while keeping the liquid surface at the 50% level of the reactor volume and collecting refined nitrogen trifluoride at a rate of 5.3 kg / hr. A 1000 mm-sized packed tower was placed in the atmospheric region of the reactor. The carbon tetrafluoride content of the refined nitrogen trifluoride thus obtained was 0.8 ppm.

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PUM

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Abstract

A highly pure nitrogen trifluoride having a carbon tetrafluoride content of 10 ppm or less can be effectively obtained by boiling crude liquid nitrogen trifluoride having carbon tetrafluoride contaminant under a pressure ranging from 35 to 45 atm, to remove carbon tetrafluoride therefrom through vaporization.

Description

TECHNICAL FIELD[0001]The present invention relates to an efficient method for purifying nitrogen trifluoride contaminated by trace carbon tetrafluoride.BACKGROUND ART[0002]Nitrogen trifluoride (NF3), which is widely used in the step of cleaning a CVD (chemical vapor deposition) device or etching a semiconductor in electronic component industry, is generally prepared by reacting fluorine (F2) with ammonia (NH3) or / and an ammonium salt, or by direct electrolysis of ammonium fluoride. Nitrogen trifluoride thus obtained contains about 10-100 ppm of carbon tetrafluoride (CF4) impurity.[0003]The recent demand of ultra-high purity nitrogen trifluoride requires that the concentration of carbon tetrafluoride be 10 ppm or less.[0004]However, as the boiling points of nitrogen trifluoride and carbon tetrafluoride are very similar, −129° C. and −128° C., respectively, differing by a mere 1° C., and the molecular sizes and polarities thereof are also similar, it has been very difficult to remove ...

Claims

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Application Information

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IPC IPC(8): C01B21/06
CPCC01B21/0837C01B21/083
Inventor LEE, YOUNG-KYUN
Owner SK SPECIALTY CO LTD
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