Gradient method preprocessing technique for depositing CVD diamond film on hard metal surface

Abstract

The present invention aims at the present existing cemented carbide surface deposition CVD diamond film pretreatment process, the speed of removing Co on the edges and sharp corners is faster than the speed of removing Co on the surface, resulting in a decrease in the strength of the edges and sharp corners, which affects The performance of the product may even cause problems such as edge and sharp corner corrosion. A gradient method pretreatment process for depositing CVD diamond film on the surface of cemented carbide is invented. Its main process flow is: polishing (1)→cleaning (2)→etching WC(3)→cleaning(4)→first etching Co(5)→cleaning(6)→drying(7)→glue coating(8)→second etching Co(9) )→Cleaning (10)→Sol (11)→Planting (12), especially the gluing process ensures that the surface pretreatment of the cemented carbide meets the deposition requirements of the CVD diamond film, and at the same time makes the edge of the cemented carbide product The amount of Co removal at the sharp corners is basically the same as that on the surface, which ensures the strength of the edges and sharp corners and improves the performance of the CVD diamond film.

Description

technical field [0001] The invention relates to a pretreatment process before depositing a CVD diamond film on the surface of a hard alloy, especially a pretreatment process that can ensure the strength of edges and sharp corners to improve the adhesion performance of the CVD diamond film, specifically a pretreatment process A gradient pretreatment process for depositing a CVD diamond film on the surface of a cemented carbide. Background technique [0002] At present, the mechanical, thermal, acoustic, electrical, optical and chemical properties of chemical vapor deposition (CVD) diamond have reached or approached those of natural diamond, and have broad application prospects in today's high-tech fields. As a widely used wear-resistant material, cemented carbide is widely used in many industrial fields. Depositing a layer of CVD diamond coating on the surface of cemented carbide products can further improve the wear resistance of cemented carbide products. Co in cemented c...

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the existing pretreatment process is easy to cause uneven Co removal at edges and sharp corners during Co removal, resulting in uneven deposition and affecting the cutting performance of tools, and to invent a CVD diamond deposited on the surface of cemented carbide The gradient method pretreatment process of the film, on the one hand, ensures that the surface pretreatment of the cemented carbide meets the deposition requirements of the CVD diamond film; Consistent, ensuring the strength of the deposited layer at edges and sharp corners, improving the performance of CVD diamond film

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