The invention discloses a longitudinal spiral HFCVD
diamond deposition
system and a deposition method.The deposition
system comprises a plurality of spiral lamp filaments located on the side of a base body, the spiral lamp filaments are arranged in the vertical direction and distributed at equal intervals in the transverse direction, the two ends of each spiral lamp filament are connected with a pre-stretching structure, and the two ends of each spiral lamp filament are connected with the corresponding pre-stretching structure; one side of the spiral filament away from the substrate is connected with the supporting structure; the pre-stretching structure comprises a plurality of
molybdenum elastic pieces distributed at equal intervals in the transverse direction, one end of each
molybdenum elastic piece is connected with the end of the spiral lamp filament, the other end of each
molybdenum elastic piece is installed on the insulating piece through a fixing screw, and gaps with adjustable sizes are formed between the molybdenum elastic pieces and the insulating piece. The supporting structure comprises a plurality of supporting molybdenum sheets which are distributed at equal intervals in the vertical direction. According to the longitudinal spiral type HFCVD
diamond deposition
system and method, the deposition performance is remarkably improved through a longitudinal spiral type filament structure, the system reliability and the process stability are enhanced, and large-area uniform deposition can be achieved.