Powder-coated atomic layer deposition device

A technology of atomic layer deposition and powder, which is applied in the direction of coating, gaseous chemical plating, metal material coating process, etc., can solve the problems of easy agglomeration of nano powder, achieve sufficient reaction, good deposition effect, and solve the effect of easy agglomeration

Active Publication Date: 2017-12-22
HUST WUXI RES INST
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Problems solved by technology

[0004] The purpose of the present invention is to provide a powder-coated atomic layer deposition device, which overcomes the disadvantage that the nano-powder is easy to agglomerate in the reaction chamber, so that the powder coating layer is uniformly coated, the thickness is controllable, and the shape retention is good.

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  • Powder-coated atomic layer deposition device

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Embodiment Construction

[0020] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

[0021] see Figures 1 to 4 As shown, this embodiment provides a powder-coated atomic layer deposition device, including a powder container 1 and a reaction chamber 2, one end of the reaction chamber 2 is provided with a source port 3, and the source port 3 is sealed with a device for inputting The inlet pipe 4 for reaction gas or carrier gas, the other end of the reaction chamber 2 is provided with a chamber door 5, and the outer side of the chamber door 5 is protrudingly provided with a first flange connection 18, and the first flange connection 18 is sealed and connected to the magnetic fluid The sealing device 6, the magnetic fluid sealing device 6 is controlled by the drive motor 7 to rotate, the inner side of the chamber door 5 is fixed with a container support frame 8, and the two ends of the ...

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Abstract

The invention discloses a powder-coated atomic layer deposition device. The powder-coated atomic layer deposition device comprises a powder container and a reaction cavity, wherein an inlet source hole is formed in one end of the reaction cavity; a gas inlet tube used for inputting reaction gas or carrier gas is arranged in the inlet source hole in a sealing mode; a cavity door is arranged at the other end of the reaction cavity; the powder container is arranged inside the cavity door; under driving of a power device, rotation can be realized; a gas inlet is formed in the powder container; the gas inlet tube enters an inner cavity of the powder container through the gas inlet; an ultrasonic vibrating rod is arranged inside the reaction cavity; and after the powder container enters the reaction cavity through a guide device, the outer side wall of the powder container is in contact with the ultrasonic vibrating rod. According to the powder-coated atomic layer deposition device disclosed by the invention, a rotary method is combined with an ultrasonic vibrating method, contact possibility of powder and reaction gas can be increased by rotation, and powder agglomeration can be relieved by energy generated by vibrations, so that powder is dispersed, and a uniform and compact film is finally coated on the surface of the powder.

Description

technical field [0001] The invention relates to an atomic layer deposition device, in particular to a powder-coated atomic layer deposition device based on the ultrasonic vibration dispersion function. Background technique [0002] Due to the larger specific surface area than ordinary materials, micro-nano-sized powder particles have physical and chemical properties different from those of general macro-scale particles, so they are widely used in fuels, coatings, electronics, catalysts and other fields. However, nano-powders also have some defects due to their inherent characteristics: due to their high surface energy, nano-powders are prone to agglomeration, making it difficult to fully exert their unique physical and chemical properties; at the same time, due to their large surface activity, resulting in some Although energetic nanomaterials have a greater combustion enthalpy than ordinary energetic materials, they are also more likely to react with air and water vapor in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/455
CPCC23C16/4417C23C16/45544
Inventor 陈蓉张晶王禄荣曲锴李嘉伟段晨龙竹鹏辉葛浩然
Owner HUST WUXI RES INST
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