Powder-coated atomic layer deposition device
A technology of atomic layer deposition and powder, which is applied in the direction of coating, gaseous chemical plating, metal material coating process, etc., can solve the problems of easy agglomeration of nano powder, achieve sufficient reaction, good deposition effect, and solve the effect of easy agglomeration
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[0020] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.
[0021] see Figures 1 to 4 As shown, this embodiment provides a powder-coated atomic layer deposition device, including a powder container 1 and a reaction chamber 2, one end of the reaction chamber 2 is provided with a source port 3, and the source port 3 is sealed with a device for inputting The inlet pipe 4 for reaction gas or carrier gas, the other end of the reaction chamber 2 is provided with a chamber door 5, and the outer side of the chamber door 5 is protrudingly provided with a first flange connection 18, and the first flange connection 18 is sealed and connected to the magnetic fluid The sealing device 6, the magnetic fluid sealing device 6 is controlled by the drive motor 7 to rotate, the inner side of the chamber door 5 is fixed with a container support frame 8, and the two ends of the ...
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