Single (double) wing type gas/ liquid two-phase composite gyration basic method and device

A reference device and double-wing technology, which is applied to bearings, shafts, bearings, mechanical equipment, etc., can solve the problem that the vibration suppression effect of the rotary body is not obvious, so as to overcome the poor stability of single-cycle motion and the poor repeatability of multi-cycle motion tracks, and improve Rotation accuracy, the effect of solving error separation

Active Publication Date: 2009-10-28
哈尔滨超精密装备工程技术中心有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method is an indirect damping method, which still uses the compressibility of the gas to construct the damping effect, so there is a large time constant and transition process, and the suppression effect on the vibration of the rotating body is not obvious

Method used

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  • Single (double) wing type gas/ liquid two-phase composite gyration basic method and device
  • Single (double) wing type gas/ liquid two-phase composite gyration basic method and device
  • Single (double) wing type gas/ liquid two-phase composite gyration basic method and device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Such as figure 1 As shown, it is a structural configuration diagram of the gas / liquid two-phase composite rotary reference device equipped with an "I"-shaped air-floating spindle. The air-floating bushing 5 is fixed on a stable substrate such as the instrument base 7. The shaft sleeve 5 constitutes the basic structure of the air bearing shaft system. An axial and radial air film gap is formed between the air bearing main shaft 1 and the air bearing sleeve 5. When the air film gap is filled with pressurized gas, a gas bearing and Lubricated, the air-floating main shaft 1 can drive the load W to rotate in the air-floating bushing 5 . Utilizing the self-lubricating properties of the gas, the rotary motion has extremely small friction, which can ensure high displacement sensitivity of the rotary motion; the average effect of the gas film can ensure high rotary motion accuracy.

[0027] In order to overcome the axial and radial medium and high-frequency micro-vibrations of ...

Embodiment 2

[0031] Figure 4 It is a structural configuration diagram of a liquid damping system arranged at the upper end of the "T"-shaped air-floating main shaft, and its working principle and damping effect are similar to those of Embodiment 1.

Embodiment 3

[0033] Figure 5 It is a structural configuration diagram of a liquid damping system arranged at the lower end of the "T"-shaped air-floating main shaft, and its working principle and damping effect are similar to those of Embodiment 1.

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Abstract

The single (double) wing type gas / liquid two-phase composite rotary reference method and device belong to the field of precision rotary reference technology; the method uses gas lubrication rotary technology and liquid damping technology in combination, and takes advantage of the significant error averaging effect of gas lubrication technology to ensure The rotation accuracy of the rotary reference; at the same time, the viscous liquid has a significant damping or energy absorption effect on the vibration component of the rotary body to suppress the generation of medium and high-frequency micro-vibrations of the rotary body, and improve the motion stability, repeatability and positioning of the rotary reference Reliability; the device is equipped with a liquid damping system with an appropriate viscosity coefficient at the upper end, or lower end, or upper and lower ends of the air-floating main shaft; Composite rotary reference for precision and positioning reliability.

Description

technical field [0001] The invention belongs to the technical field of precision rotary reference, in particular to a single (double) wing type air / liquid two-phase compound rotary reference method and device. Background technique [0002] Rotary reference is one of the core technical units in precision / ultra-precision measuring instruments, test equipment and manufacturing equipment. Due to the advantages of high rotary motion precision, high displacement sensitivity and minimal friction loss, the air-bearing shaft system has been more and more used in the above-mentioned equipment as a high-precision rotary reference. [0003] At present, the commonly used air bearing shafting structure is mainly composed of two parts: the air bearing main shaft and the air bearing sleeve. When the air film gap is built in the axial and radial directions to form gas support and lubrication, the air bearing main shaft drives the load on the air bearing sleeve. Make a rotary motion inside. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16C32/06
Inventor 谭久彬黄景志金国良杨文国
Owner 哈尔滨超精密装备工程技术中心有限公司
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