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Flat display glass substrate etching apparatus and method for etching glass substrate

A flat-panel display and glass substrate technology, applied in the direction of instruments, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of reducing the uniformity of the glass substrate, uneven etching of the glass substrate, etc.

Active Publication Date: 2008-10-15
SAMSUNG DISPLAY CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the uniformity of the glass substrate is lowered, and the glass substrate is unevenly etched

Method used

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  • Flat display glass substrate etching apparatus and method for etching glass substrate
  • Flat display glass substrate etching apparatus and method for etching glass substrate
  • Flat display glass substrate etching apparatus and method for etching glass substrate

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Embodiment Construction

[0030] Hereinafter, the present invention will now be described more fully with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. However, this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like reference numerals refer to like elements throughout.

[0031] It will be understood that when an element is referred to as being "on" another element, it can be directly on the other element or intervening elements may be present therebetween. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[00...

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PUM

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Abstract

The invention provides etching equipment of glass substrate of flat display and a method for etching glass substrate of flat display. The etching equipment comprise: an etching chamber, structured to a containing clamp; a glass substrate, mounted on the clamp; a holding component, connected to the clamp for clamping the glass substrate; a conveying wire, connected to the clamp for conveying it to the etching chamber; and an ejection component for ejecting the etching agent on surface of the glass substrate. Pressure intensity of ejection of the etching agent is not smaller than about 0.1kg / cm2, and smaller than about 0.5kg / cm2.

Description

[0001] This application claims priority from Korean Patent Application No. 2007-35108 filed on Apr. 10, 2007, the contents of which are hereby incorporated by reference in their entirety. technical field [0002] The invention relates to an etching device for a glass substrate of a flat panel display. More particularly, the present invention relates to an etching apparatus that shortens an etching process time and improves uniformity of a glass substrate. Background technique [0003] For example, flat panel displays such as liquid crystal displays, plasma display panels, electroluminescent displays, and vacuum fluorescent displays are widely used in various electronic devices. In order to use flat panel displays in mobile electronic devices such as mobile phones and personal digital assistants, for example, flat panel displays need to have desirable properties (eg, thin and lightweight). For this reason, research and development have been conducted on glass substrate assem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/00C03C15/00
CPCH01L21/68707C03C15/00G02F1/1303H01L21/6708G02F1/13
Inventor 崔浩根金龙佑李明基金八坤
Owner SAMSUNG DISPLAY CO LTD