Improved holding device of evaporated materials of evaporator

A technology of a holding device and an evaporation machine, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of shortened service life, inapplicability, and affecting the mechanical properties of knives and tools, and achieves easy maintenance , Low manufacturing cost and simple structure

Active Publication Date: 2010-06-09
徐正群 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in the above-mentioned structure, the holding device of the object to be plated still has imperfections in actual use, because the fixed seat is suitable for inserting tools such as slender shafts or rods, and it is relatively difficult for tools su

Method used

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  • Improved holding device of evaporated materials of evaporator
  • Improved holding device of evaporated materials of evaporator
  • Improved holding device of evaporated materials of evaporator

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Embodiment Construction

[0033] The detailed description and technical content of the present invention are described below with accompanying drawings. However, the attached drawings are provided for reference and illustration only, and are not intended to limit the present invention.

[0034] Please refer to Figure 1 to Figure 3 , the present invention provides an improved holding device for an evaporation machine; in this embodiment, the holding device 1 is installed inside the evaporation machine 2 for holding the object to be plated, and the holding device 1 is driven by a driving device 10a Driven and supported by it, the driving device 10a has a fixed shaft 11a and a rotating shaft 12a, the fixed shaft 11a is vertically fixed on the inner top surface of the vapor deposition machine 2, and one end of which is pivoted with a rotating wheel 13a , and the rotating shaft 12a is connected to a driving device such as a motor (not shown) and is electrically connected to the bias power supply 9 to drive...

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Abstract

The invention provides an improved holding device of an evaporated material of an evaporator, which comprises a first transmission mechanism, a supporting frame, a pair of second transmission mechanisms and a third transmission mechanism, wherein the first transmission mechanism comprises a first rotating shaft and a first rotating wheel which are driven to rotate by a driving device; the supporting frame is provided with a fixed disk and a supporting arm connected with the fixed disk; the second transmission mechanisms are respectively formed at the opposite sides of the first rotating wheel, and the second transmission mechanisms comprise a second rotating wheel, a second rotating shaft and a third rotating wheel, wherein the second rotating wheel rotates around the first rotating wheel, the second rotating shaft penetrates through the second rotating wheel and the fixed disk, and the third rotating wheel is connected with the second rotating shaft; and the third transmission mechanism comprises a fourth rotating wheel and an evaporated material bearing shaft, wherein the fourth rotating wheel is driven by the third rotating wheel, the evaporated material bearing shaft penetrates through the fourth rotating wheel and the supporting arm, and the shaft axis of the evaporated material bearing shaft is vertical to the extension line of the shaft axis of the first rotating shaft. Thus, the holding device for the evaporated material can be in revolution and rotation.

Description

technical field [0001] The invention relates to a holding device, in particular to a holding device installed inside an evaporation machine for clamping an object to be plated. Background technique [0002] Generally, decorations, tableware, or knives, tools, mold semiconductor components, etc. on the market, all use a large number of physical vapor deposition (PVD, Physical Vapor Deposition) on the surface of these items to coat the surface of the plated object with nano-ions, so as to Increase the heat resistance, corrosion resistance, surface hardness and prolong the service life of the object to be plated; however, how to coat the nano-ion continuously and uniformly on the surface of the object to be plated, so as to greatly increase its mechanical properties and prolong the service life Lifespan has become an important topic studied by relevant people engaged in this industry. [0003] For example, the applicant has applied for the patent No. I288963 in Taiwan, China, ...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/50
Inventor 徐正群陈竞清
Owner 徐正群
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