Acoustic-electro conversion chip of silk-ribbon microphone

Abstract

The invention provides an acoustic-electro conversion chip of a silk-ribbon microphone, which is made by a semiconductor process technology and a micro electro mechanical technology. The acoustic-electro conversion chip comprises a supporting frame layer and a response unit layer which is arranged on a supporting frame and is used for transforming acoustic energy into an induced electromotive force which can be output for application, wherein the response unit is provided with an insulating diaphragm layer and a voice coil film which is arranged on the diaphragm and can be conductive; the diaphragm comprises a vibration area which can deform under the action of the acoustic energy and a fixed area which is connected to the supporting frame; and the voice coil film comprises two voice coils which are wound in the same direction in a rectangular shape from inside to outside, and each voice coil comprises a plurality of first vertical sections which are vertical to a field direction and positioned in the vibration area and can generate the induced electromotive force by displacement. By virtue of the design, the sensibility of the voice coil film can be increased, and the frequency response characteristics of the silk-ribbon microphone can be effectively enhanced.

Description

technical field [0001] The invention relates to a chip, in particular to a vibrating film chip of a ribbon microphone used for packaging the microphone. Background technique [0002] Divided by the conversion method of "sound" and "electricity", microphones are divided into three categories: capacitive, piezoelectric, and ribbon (Ribbon MIC, also known as dynamic). [0003] The characteristic of the condenser microphone is that the diaphragm that can be acted on by the sound energy is a capacitor. When the sound energy acts on the diaphragm, the diaphragm will vibrate (deform), and the originally designed capacitance will change, so that the Capacitance changes and converts to generate a small potential difference, which is then amplified and sent out as an electronic signal for subsequent applications; the characteristic of the piezoelectric microphone is that the diaphragm that can be affected by sound energy is composed of piezoelectric materials such as quartz. When the...

AI Technical Summary

Problems solved by technology

[0013] Although a miniature ribbon microphone chip can be produced by using semiconductor manufacturing process and micro-electromechanical technology, the result of miniaturization will reduce the length of the voice coil 14 of the dynamic microphone chip and reduce the sensitivity of the packaged ribbon microphone.

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