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Safe delivery device for special chemicals

A conveying device and chemical technology, which is applied to special packaging objects, packaging corrosive chemicals, transportation and packaging, etc., can solve the problems of fragile quartz bottles, high risk of chemical leakage, high operational risk and high labor maintenance costs and other problems, to achieve the effect of reducing the number of bottle changing operations, wide application range, and simple and portable connection mode

Active Publication Date: 2011-01-05
SHANGHAI ZHENGFAN TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because quartz bottles are fragile, there is a high risk of chemical leakage during long-distance transportation, and frequent bottle changes during operation also lead to high operational risks and labor maintenance costs

Method used

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  • Safe delivery device for special chemicals
  • Safe delivery device for special chemicals

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Embodiment

[0016] As shown in Figure 1, it is a schematic structural diagram of a safe delivery device for special chemicals. The safety delivery device for special chemicals includes a casing 1 and its upper cover 12, the casing 1 is divided into upper and lower parts, and a sealing device 11 is provided between the upper and lower parts of the casing 1 and between the casing 1 and the upper cover 12 The inner side of the shell 1 is provided with a buffer device 2, the inner side of the buffer device 2 is provided with a quartz inner tank 3, the upper part of the quartz inner tank 3 is arranged in the upper part of the outer shell 1, and the upper side of the outer shell 1 is provided with a handle 4, and the quartz inner tank 3 The top of the bile 3 is provided with a first gas valve 5 and a first liquid valve 6, and the first gas valve 5 and the first liquid valve 6 are respectively connected to the second gas valve 7 and the second liquid valve 8 through the gas pipeline and the liqui...

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Abstract

The invention provides a safe delivery device for special chemicals. The device comprises a shell and an upper cover thereof, wherein the shell is divided into an upper part and a lower part, and sealing devices are arranged between the upper part and the lower part of the shell and between the shell and the upper cover. The device is characterized in that: a buffer device is arranged inside the shell; a quartz liner is arranged inside the buffer device; an upper part of the quartz liner is arranged inside the upper part of the shell; a handle is arranged on the side face of the upper part of the shell; a first gas valve and a first liquid valve are arranged at the top end of the quartz liner; the first gas valve and the first liquid valve are connected with a second gas valve and a second liquid valve through a gas pipeline and a liquid pipeline respectively; the second gas valve and the second liquid valve are arranged on a stainless steel plate; and the stainless steel plate is fixed inside the upper part of the shell. The safe delivery device has the advantages of safety and reliability.

Description

technical field [0001] The invention relates to a safety delivery device for special chemicals, which is used for safe delivery of special chemicals required in semiconductor manufacturing and other processes. Background technique [0002] Some special chemicals used in specific fields such as semiconductors, solar energy, and integrated circuits often have characteristics such as strong corrosiveness, strong oxidization, high toxicity, and violent reaction with water. Once leaked, it will not only seriously threaten the health of operators, but also Seriously pollute the environment and cause unnecessary losses and injuries to enterprises, individuals and society. Therefore, care must be taken during storage, transportation and operation. For the device materials suitable for holding such chemicals, only Hastelloy alloy can meet the requirements of anti-corrosion and anti-pollution among metal materials, but the price is very expensive and it is not easy to promote and use...

Claims

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Application Information

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IPC IPC(8): B65D85/84B65D85/82B65D25/02B65D25/24
Inventor 李东升曾庆腾张敏
Owner SHANGHAI ZHENGFAN TECH
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