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Combined pumping system comprising a getter pump and an ion pump

A technology of air extraction system and getter pump, which is applied in the direction of electrical components, circuits, discharge tubes, etc.

Active Publication Date: 2013-02-13
SAES GETTERS SPA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This system can improve the weight and size of the vacuum system, but still has two separate pumps, which is a non-negligible burden on the whole system

Method used

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  • Combined pumping system comprising a getter pump and an ion pump
  • Combined pumping system comprising a getter pump and an ion pump
  • Combined pumping system comprising a getter pump and an ion pump

Examples

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Embodiment Construction

[0017] figure 1 A schematic cross-sectional view of the air extraction system of the present invention is shown. The pumping system 10 comprises a flange 11 on which a getter pump 12 and an ion pump 13 are mounted. The getter pump 12 and the ion pump 13 are arranged at two different points on the same side of the flange 11 .

[0018] figure 2 and image 3 A first embodiment of the air extraction system of the present invention is shown. Note that these figures show the ion pump in its simplest configuration, ie in which there is only one cylindrical anode, but there may be more than one anode element.

[0019] The getter pump 12 may be formed from elements made of NEG material having different shapes and assembled according to different geometric relationships. The getter pump 12 comprises a series of discs 121, 121', . . . of NEG material stacked on a central support 122 and connected to each other eg by metal ring 123 (in figure 1 not visible in the figure) remain sp...

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PUM

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Abstract

A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber.

Description

technical field [0001] The invention relates to a combined pumping system comprising a getter pump and an ion pump. Background technique [0002] The operation of many industrial and scientific instruments and systems requires ultra-high vacuum conditions (expressed in this field by UHV, which is equivalent to less than 10 -5 -10 -6 Pa pressure). Among these instruments and systems, mention may be made of particle accelerators and electron microscopes. To generate such a vacuum, a pump comprising a pump defined as a main pump (e.g., a rotary pump or a diaphragm pump) and a UHV pump (e.g., a turbomolecular, getter, ion, or cryopump) is used. system. The main pump can start running at atmospheric pressure and reduce the pressure inside the vacuum chamber of the instrument to about 10 -1 -10 -2 The value of Pa. At this pressure, the UHV pump can be started, and the UHV pump will reduce the pressure of the system to about 10 -8 -10 -9 The value of Pa. [0003] Currentl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J41/00
CPCH01J41/00
Inventor M·L·费里斯A·孔特
Owner SAES GETTERS SPA