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Three-axis Roots vacuum pump

A Roots vacuum pump and three-shaft technology, applied in pumps, rotary piston pumps, rotary piston machines, etc., can solve the problems of unstable operation and low pumping efficiency of vacuum pumps, and achieve improved dynamic balance performance, compact structure, Effect of high pumping rate

Active Publication Date: 2012-12-26
NORTHEASTERN UNIV LIAONING +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Aiming at the problems existing in the current Roots vacuum pump, the present invention provides a three-axis Roots vacuum pump, which solves the problems of low pumping efficiency and unstable operation of the vacuum pump

Method used

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Examples

Experimental program
Comparison scheme
Effect test

example 1

[0018] Example 1. A three-axis Roots vacuum pump of the present invention, wherein the motor 1 is connected to the main shaft 3 through a coupling 2, the driving gear 4, the left driven gear 13 and the right driven gear 5 are respectively assembled on the main shaft 3 through a key connection , on the left driven shaft 12 and the right driven shaft 6, the three shafts are arranged in parallel, the middle main shaft 3 is driven by the motor 1, driven by the three synchronous gears, the three shafts rotate in opposite directions to each other, and the main shaft 3 , the left driven shaft 12 and the right driven shaft 6 are fixed with five-stage 4-lobe Roots rotors, and the Roots rotors are respectively fixed on the three shafts through key connections, the main shaft 3, the left driven shaft 12 and the right driven shaft The shaft shoulders at both ends of the shaft 6 are equipped with bearings. The upper bearing 17 is fixed on the upper bearing seat 21. The cavity inside the upp...

example 2

[0023] Example 2. Its structure, connection and working process are the same as in Embodiment 1, the difference is that the number of stages of the Roots rotor is 2, and the number of leaves is 6 leaves.

example 3

[0024] [0018] Example 3. Its working process is the same as that of Embodiment 1, except that the main shaft 3, the left driven shaft 12 and the right driven shaft 6 are arranged in a triangle.

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Abstract

The invention relates to a vacuum pump, in particular to a three-axis Roots vacuum pump, which comprises a motor, a spindle and driven shafts, wherein the spindle is provided with a driving gear; driven gears meshed with the driving gear are arranged on the driven shafts; Roots rotors are arranged on the spindle and the driven shafts; and the two driven shafts are parallelly and symmetrically arranged on two sides of the spindle. The three-axis Roots vacuum pump has the characteristics of compact and symmetric structure, air suction under the action of the three axes and no oil in a pump cavity and realizes a high air suction speed.

Description

technical field [0001] The invention relates to a vacuum pump, in particular to a three-axis Roots vacuum pump. Background technique [0002] Roots vacuum pump is a kind of vacuum pump commonly used in semiconductor, photovoltaic industry, petrochemical industry, food processing and other industries. The multi-stage Roots dry pump for exhausting the atmosphere is very versatile. However, the existing Roots vacuum pumps of various forms all adopt a two-shaft type, one driving shaft drives a driven shaft, not only the pumping rate is small, but also due to the periodic force on the driving shaft and the bending force Large torque, poor dynamic balance performance of the rotor shaft, high vibration and noise, resulting in high energy consumption and low efficiency of the Roots vacuum pump. Contents of the invention [0003] Aiming at the problems existing in the current Roots vacuum pump, the present invention provides a three-axis Roots vacuum pump, which solves the proble...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04C25/02F04C18/14
Inventor 刘坤巴德纯岳向吉李培印王光玉张振厚
Owner NORTHEASTERN UNIV LIAONING
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