touch panel sensor

A touch panel and sensor technology, applied in the direction of instruments, electrical digital data processing, input/output process of data processing, etc., can solve problems such as inability to ensure electrical conductivity, and achieve high reliability and excellent durability

Inactive Publication Date: 2016-04-06
KOBE STEEL LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when pure Al is used as a wiring material, there is a problem that insulating aluminum oxide is formed between the transparent conductive film of the touch panel sensor and the pure Al film, and electrical conductivity cannot be ensured.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] An alkali-free glass plate (thickness 0.7 mm, diameter 4 inches) is set as a substrate, and on its surface, the types and contents of the rare earth elements shown in the following Table 1 are formed by DC magnetron sputtering (the unit is atom %, balance: Al and unavoidable impurities) different Al alloy films (film thicknesses are all about 500nrn). Before film formation, the atmosphere in the chamber is temporarily set to reach the vacuum degree: 3×10 -6 After Torr, the film-forming temperature and the Ar gas pressure were varied as shown in Table 1 using a disc-shaped target with a diameter of 4 inches having the same composition as that of each Al alloy film. Other sputtering conditions are as follows. Next, the Al alloy after film formation was heat-treated for 30 minutes at various annealing temperatures described in Table 1 in a nitrogen atmosphere. In Table 1, "-" means no heating (ie, room temperature). In addition, the composition of the formed Al alloy fi...

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Abstract

The invention provides a touch pad sensor having advantages of good durability of load pressed from the vertical pressing, difficulty in breaking lines, ability of improving the resistance, and high reliability. The touch pad sensor is provided with a transparent conductive film and the wiring connected with the transparent conductive film. The wiring can be started from the substrate side, and is constituted by a metal film with a high melting point, A1 alloy membrane, and a metal film with a high melting point. The A1 alloy membrane contains a 0.05-5atom% rare-earth element having the 80-200GPa Young modulus. The maximum value tangent line diameter of the grain in the determined direction (the Feret diameter) is in a range of 100-350mm.

Description

technical field [0001] The present invention relates to a touch panel sensor having a transparent conductive film and wiring connected thereto. Background technique [0002] The touch panel sensor used as an input switch integrated with the image display device arranged on the front of the image display device is convenient and quick to use, so it is widely used in the operation of bank ATMs, ticket machines, navigators, PDAs, and copiers screen etc. The detection method of the input point includes a resistive film method, an electrostatic capacity method, an optical method, an ultrasonic surface acoustic wave method, a piezoelectric method, and the like. Among them, the resistive film method and the electrostatic quantity method are most widely used for reasons such as low cost and simple structure. [0003] The capacitive touch panel sensor has a structure in which a transparent conductive film is formed on the front and back of a substrate (such as a glass substrate and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F3/041G06F3/045
Inventor 奥野博行三木绫钉宫敏洋
Owner KOBE STEEL LTD
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