Method for continuous production of ultrapure hydrogen peroxide

An ultra-pure hydrogen peroxide, hydrogen peroxide technology, applied in chemical instruments and methods, peroxide/peroxyhydrate/peroxyacid/superoxide/ozone, inorganic chemistry, etc., can solve the problem of peroxide Hydrogen does not meet the SEMIC12 standard, the exchange resin loses its purification ability, explosion and other problems, to achieve the effect of reasonable combination sequence, stable product quality and reducing resin damage

Inactive Publication Date: 2012-07-11
SHANGAI HUAYI MICROELECTRONICS MATERIAL +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since hydrogen peroxide is a dangerous explosive, it is affected by various factors such as temperature and ion exchange resin sequence in the production process; at the same time, hydrogen peroxide has the characteristics of strong oxidation and decomposition when encountering alkali, and it is easy to damage the exchange resin. The skeleton structure makes the exchange resin lose its purification ability, and at the same time, it will produce a large amount of impurities such as organic peroxides and epoxides, and even explode; and industrial-grade hydrogen peroxide is generally produced by anthraquinone method, which contains a large amount of organic and inorganic impurities. , the hydrogen peroxide produced by the simple anion exchange resin column and cation exchange resin column in series or in combination in the above patent technology cannot meet the SEMI C12 standard

Method used

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  • Method for continuous production of ultrapure hydrogen peroxide
  • Method for continuous production of ultrapure hydrogen peroxide

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] The temperature is controlled at 5℃, and 30wt% industrial-grade hydrogen peroxide passes through the macroporous polystyrene adsorption resin column at a flow rate of 200kg / h to pre-treat the industrial-grade hydrogen peroxide raw materials, and remove the organic impurities in the raw materials (with organic carbon Calculated) content is reduced to less than 200ppm. cool down.

[0032] Under the same process conditions, the pretreated hydrogen peroxide passes through a strong acid cation exchange resin column and a strong basic anion exchange resin column; the hydrogen peroxide after ion exchange enters the anion and cation exchange resin mixed column (anion exchange resin and The volume ratio of cation exchange resin is 1:1) for secondary ion exchange;

[0033] Maintain a temperature of 5-20℃, and pass the second-stage ion exchange liquid material after the central control analysis is passed into the polytetrafluoroethylene ultrafiltration membrane (0.1μm) filter. The fil...

Embodiment 2

[0035] The temperature is controlled at 5℃, 30wt% industrial grade hydrogen peroxide passes through the macroporous polystyrene adsorption resin column at a flow rate of 300kg / h to pretreat the industrial grade hydrogen peroxide raw materials, and remove the organic impurities in the raw materials (with organic carbon Calculated) content is reduced to less than 200ppm. cool down.

[0036] Referring to Example 1, the pretreated hydrogen peroxide is passed through a strongly acidic cation exchange resin column and a strongly basic anion exchange resin column; the hydrogen peroxide after ion exchange enters the anion and cation exchange resin mixed column (anion exchange resin and cation The exchange resin volume ratio is 1:1.5) Perform secondary ion exchange;

[0037] Maintain a temperature of 5-20℃, and pass the second-stage ion exchange liquid material after the central control analysis is passed into the polytetrafluoroethylene ultrafiltration membrane (0.1μm) filter. The filtere...

Embodiment 3

[0039] The temperature is controlled at 5℃, and 30wt% industrial grade hydrogen peroxide passes through the macroporous polystyrene adsorption resin column at a flow rate of 400kg / h to pretreat the industrial grade hydrogen peroxide raw materials, and remove the organic impurities in the raw materials (with organic carbon Calculated) content is reduced to less than 200ppm. cool down.

[0040] Referring to Example 1, the pretreated hydrogen peroxide is passed through a strongly acidic cation exchange resin column and a strongly basic anion exchange resin column; the hydrogen peroxide after ion exchange enters the anion and cation exchange resin mixed column (anion exchange resin and cation The volume ratio of the exchange resin is 1:2) Perform secondary ion exchange;

[0041] Maintain a temperature of 5-20℃, and pass the second-stage ion exchange liquid material after the central control analysis is passed into the polytetrafluoroethylene ultrafiltration membrane (0.1μm) filter. Th...

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Abstract

The invention relates to a method for continuous production of ultrapure electronic-grade hydrogen peroxide. The ultrapure hydrogen peroxide is obtained through preprocessing industrial grade hydrogen peroxide adopted as a raw material by a macroporous adsorption resin, carrying out first-stage ion exchange by a cation exchange resin and an anion exchange resin, allowing the obtained solution to enter a multi-stage mixed anion and cation exchange resin column, and carrying out ultrafine filtration. The method which has the advantages of good safety, simple operation and stable product quality is suitable for the large-scale continuous production.

Description

Technical field [0001] The invention relates to a method for producing electronic grade chemical reagents, in particular to a method for continuously producing ultra-pure electronic grade hydrogen peroxide. Background technique [0002] Electronic grade hydrogen peroxide is mainly used for the cleaning and corrosion of large-scale integrated circuits. With the development of the electronics industry, the integration of integrated circuits is getting higher and higher. This also raises the quality and purity of electronic grade chemicals such as hydrogen peroxide. More demanding requirements. [0003] China’s traditional method of producing electronic grade hydrogen peroxide is basically to process industrial hydrogen peroxide into reagent grade or food grade as a raw material, and lack of industrial grade hydrogen peroxide as a raw material to directly produce ultra-pure peroxide that meets SEMI C12 standards. Hydrogen method; therefore, the raw material cost is high and the econo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B15/013
CPCC01B15/0135C01B15/013
Inventor 汤慧詹家荣
Owner SHANGAI HUAYI MICROELECTRONICS MATERIAL
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