4-14.5-micrometer infrared wide-spectrum beam splitting film with znse substrate

An infrared spectroscopic and wide-spectrum technology, applied in the field of infrared spectroscopic film, can solve the problems of poor spatial reliability and lack of special protection for large-diameter KBr crystal cold processing, etc., achieve stable product performance, improve spectral efficiency and spatial reliability, and be widely used Effect

CN103293577AActive Publication Date: 2013-09-11SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2013-09-11

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Abstract

The invention discloses an infrared wide-spectrum beam splitting film which utilizes ZnSe crystals as the substrate. The infrared wide-spectrum beam splitting film has a working angle of 0-30 degrees, is coated on a ZnSe substrate, utilizes Ge and ZnSe as high-refraction-index materials and low-refraction-index materials and utilizes a film system design method of high-low refraction index alternation to obtain the matching of the refraction index. Specific processes such as ion source assistance and appropriate substrate temperature are utilized during the production process of the large-angle infrared incidence wide-spectrum beam slitting film. When having an incident angle of 0-30 degrees, the infrared wide-spectrum beam splitting film can achieve balanced beam splitting. The infrared wide-spectrum beam splitting film is stable in performance and applicable to the utilization of wide-spectrum beam splitting of an interference system in an interference atmospheric exploration technology.
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Description

technical field

[0001] The invention relates to optical thin film technology, in particular to an infrared spectroscopic film based on a ZnSe crystal for balanced light splitting of optical energy within a wide infrared spectral range of 4-14.5 μm. technical background

[0002] The atmospheric vertical sounder is one of the main infrared remote sensing instruments carried on meteorological satellites. It uses Fourier transform-based interferometric spectroscopy to split the spectrum of atmospheric radiation, and the beam splitting technology is one of the interferometric spectroscopic systems. key technologies. Since the atmospheric vertical detector needs to detect the atmospheric spectrum in the range of 4-14.5μm, it is required that the base material of the spectroscopic film must first be transparent in this range, and considering the influence on the spectral efficiency, the base material must be transparent in this range. The absorption of the band must also be as sma...

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Embodiment Construction

[0022] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0023] The concrete technical index requirement of the embodiment of the present invention is:

[0024] Spectrum Coverage

Transmission / reflection energy ratio of beam splitting surface

Spectral efficiency

4~14.5

T / R=0.8-1.2

E=4RT=0.9~1

[0025] The substrate material is ZnSe, and the maximum incident angle is 30°.

[0026] According to technical requirements, using infrared optical crystal ZnSe as the substrate, in order to achieve efficient and balanced light splitting in the 4-14.5 μm infrared band, the film system and process design must first consider reducing the absorption of A in T+R+A=1 as much as possible. Therefore, a suitable film coating process is very important. In the design of the film system, a multi-layer film structure with alternating high and low refractive in...