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Alignment device, workpiece carrying device, and alignment method

A technology for aligning devices and workpieces, applied to electrical components, conveyor objects, transportation and packaging, etc., can solve the problems of increasing the cost of materials for manufacturers

Inactive Publication Date: 2016-09-07
VARIAN SEMICON EQUIP ASSOC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This will increase the manufacturer's material cost

Method used

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  • Alignment device, workpiece carrying device, and alignment method
  • Alignment device, workpiece carrying device, and alignment method
  • Alignment device, workpiece carrying device, and alignment method

Examples

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Embodiment Construction

[0021] Embodiments described herein are in relation to ion implanters. However, these embodiments may be used with other systems and processes involving workpiece fabrication. Although solar cells are specifically listed, the embodiments may also be applied to other workpieces, such as semiconductors or light-emitting diodes (LEDs). While one particular vehicle design is illustrated, other designs (such as those with one wall surrounding three sides, two parallel walls, five or six columns instead of the illustrated four columns) are possible. Therefore, the present invention is not limited to the Examples described below.

[0022] Regardless of any of the previously mentioned disadvantages, the alignment apparatus disclosed herein enables a workpiece, such as a solar cell workpiece, to be aligned on a carrier or cassette. Alignment can increase productivity or reduce material costs. During the setup or calibration of any tool, the alignment apparatus disclosed herein can r...

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Abstract

An alignment device has a carriage, two rails on the carriage that are configured for a workpiece to pass therebetween, and a finger that protrudes a distance from the carriage. The finger is configured to be disposed on a carrier for the workpieces. The workpieces may be solar cells and may pass through the rails on a conveyor belt. The alignment device may move in order to align the workpieces as the workpieces are loaded into a carrier.

Description

technical field [0001] The present invention relates to aligning workpieces into carriers, and more particularly to aligning solar cell workpieces into carriers. Background technique [0002] Ion implantation is a standard technique for introducing conductivity-altering impurities into workpieces. The desired impurity material is ionized in the ion source, the ions are accelerated to form an ion beam of specified energy, and the ion beam is directed toward the surface of the workpiece. The energetic ions in the ion beam penetrate into the bulk of the workpiece material and intercalate into the crystalline lattice of the workpiece material to form regions of desired conductivity. [0003] An example of a workpiece is a solar cell. A reduction in the manufacturing cost of high-efficiency solar cells or any improvement in the efficiency of high-efficiency solar cells would have a global positive impact on the manufacture of solar cells. This will enable wider availability of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677H01L21/68
CPCH01L21/67769H01L21/67775H01L21/67781H01L21/68H01L21/681Y10T29/49764Y10T29/49829Y10T29/53022Y10T29/53539H01L21/67706H01L21/6773B65G49/07
Inventor 麦考林·N·丹尼尔威廉·T·维弗查理斯·T·卡尔森
Owner VARIAN SEMICON EQUIP ASSOC INC