Coating device
A coating device and coating liquid technology, which is applied to the surface coating liquid device, coating, etc., can solve problems such as complex structure
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Embodiment approach 1
[0051] The coating apparatus of this embodiment is demonstrated using FIG. 1. FIG. The key point is to control so that the portion of the substrate in contact with the rod and its peripheral surface have a predetermined curvature.
[0052] 1 is an enlarged view of main parts showing the structure of a coating apparatus according to Embodiment 1, FIG. 1( a ) is a cross-sectional view of main parts, and FIG. 1( b ) is a plan view of main parts.
[0053] The device shown in FIG. 1 is characterized in that a pressure receiving part 120 is provided on the stage 102 at the lower part of the rod 109 . By providing the pressure receiving portion 120 , the substrate 103 is placed on the pressure receiving portion 120 under the rod 109 , and the substrate 103 is pressed to the stage 102 by the roller 116 at the peripheral portion of the rod 109 . As a result, the substrate 103 deforms into a protruding curved surface at the portion in contact with the rod 109 , and the warpage or uneve...
Embodiment approach 2
[0056] Next, use image 3 ~ FIG. 5 demonstrates the coating apparatus of Embodiment 2. FIG. image 3 FIG. 4 is a perspective view showing the coating device according to the second embodiment, and FIG. 4 is a cross-sectional view showing the coating device according to the second embodiment. In addition, FIG. 5 is a diagram showing a configuration example of a pressure receiving portion according to Embodiment 2. As shown in FIG.
[0057] exist image 3 In FIG. 4 , 201 is a supply unit that supplies the coating liquid 204 onto the substrate 203 provided on the stage 202 along the width direction of the substrate 203 . In Embodiment 2, a dispenser in which a supply needle 206 is attached to the tip of a syringe 205 is used as the supply unit 201 .
[0058]The supply unit 201 of the coating liquid 204 is connected to the ball screw 208 , and the coating liquid 204 can be completely coated on the substrate 203 by moving the supply unit 201 in the width direction of the substra...
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