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Coating device

A coating device and coating liquid technology, which is applied to the surface coating liquid device, coating, etc., can solve problems such as complex structure

Inactive Publication Date: 2015-11-18
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the suction pad 408 and the exhaust hole 411 connecting the suction pad 408 and the vacuum pump 412 are required, which results in a device with a complicated structure.

Method used

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Experimental program
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Embodiment approach 1

[0051] The coating apparatus of this embodiment is demonstrated using FIG. 1. FIG. The key point is to control so that the portion of the substrate in contact with the rod and its peripheral surface have a predetermined curvature.

[0052] 1 is an enlarged view of main parts showing the structure of a coating apparatus according to Embodiment 1, FIG. 1( a ) is a cross-sectional view of main parts, and FIG. 1( b ) is a plan view of main parts.

[0053] The device shown in FIG. 1 is characterized in that a pressure receiving part 120 is provided on the stage 102 at the lower part of the rod 109 . By providing the pressure receiving portion 120 , the substrate 103 is placed on the pressure receiving portion 120 under the rod 109 , and the substrate 103 is pressed to the stage 102 by the roller 116 at the peripheral portion of the rod 109 . As a result, the substrate 103 deforms into a protruding curved surface at the portion in contact with the rod 109 , and the warpage or uneve...

Embodiment approach 2

[0056] Next, use image 3 ~ FIG. 5 demonstrates the coating apparatus of Embodiment 2. FIG. image 3 FIG. 4 is a perspective view showing the coating device according to the second embodiment, and FIG. 4 is a cross-sectional view showing the coating device according to the second embodiment. In addition, FIG. 5 is a diagram showing a configuration example of a pressure receiving portion according to Embodiment 2. As shown in FIG.

[0057] exist image 3 In FIG. 4 , 201 is a supply unit that supplies the coating liquid 204 onto the substrate 203 provided on the stage 202 along the width direction of the substrate 203 . In Embodiment 2, a dispenser in which a supply needle 206 is attached to the tip of a syringe 205 is used as the supply unit 201 .

[0058]The supply unit 201 of the coating liquid 204 is connected to the ball screw 208 , and the coating liquid 204 can be completely coated on the substrate 203 by moving the supply unit 201 in the width direction of the substra...

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PUM

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Abstract

The invention aims to provide a coating apparatus, which is capable of coating the coating liquid on a warping and uneven substrate. A mechanism (116) which presses a substrate (103) through a lever (109) when a coating liquid (104) supplied to the substrate (103) is stretched controls the shape of the substrate (103) of a stretching area. Accordingly, the coating liquid can be easily and uniformly coated on a warping and uneven substrate with high precision.

Description

technical field [0001] The invention relates to a coating device. Background technique [0002] Conventionally, bar coating methods, die coating methods, and roll coating methods have been used as a method for uniformly coating coating liquids on substrates used in electronic devices such as semiconductor wafers and display devices with high precision. [0003] The bar coating method is a method of stretching a coating liquid coated on a substrate to a predetermined film thickness with a bar coater. The die coating method is a method of securing a coating film thickness between the front end of a die from which a certain amount of coating liquid is applied and a substrate. In addition, the roll coating method is a method of forming a predetermined coating film layer on the surface of a roll and transferring it to a substrate. Regardless of the method, the thickness accuracy of the coating film is ensured by making the rod coater, die nozzle or roller close to the substrate...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05C5/00B05C11/02B05C13/00
Inventor 村岸勇夫土田修三参川茂堀川晃宏广田修
Owner PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD