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A thermal-electrostatic strong recovery type mems four-point support suspension beam structure

A technology of four-point support and suspension beams, which is applied to televisions, generators/motors, and components of television systems, etc., can solve problems such as difficult recovery, increase effective stiffness, make the structure and method feasible, and improve recovery ability Effect

Inactive Publication Date: 2015-10-28
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to make the beam pull down to the "down" state smoothly, it is often hoped that the stiffness of the beam should not be too large during structural design, but it is often difficult for a beam with low stiffness to return to the "up" state after the voltage is released.

Method used

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  • A thermal-electrostatic strong recovery type mems four-point support suspension beam structure
  • A thermal-electrostatic strong recovery type mems four-point support suspension beam structure

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Embodiment Construction

[0016] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0017] Such as figure 1 and figure 2 As shown, a thermal-static strong recovery type MEMS four-point support suspension beam structure of the present invention, the structure includes a substrate 1, a pull-down electrode 2 for electrostatic excitation, anchor areas 31-34, a suspension main beam 4, Bending support beams 5 and 6. The suspension main beam 4 is suspended above the substrate 1 through four anchor areas 31 , 32 , 33 , 34 and bending support beams 5 and 6 at both ends.

[0018] Such as figure 1 and figure 2 As shown, the bending support beam 5 is composed of a crossbeam 51 and two groups of parallel longitudinal beams 52 , 53 and 54 , 55 . Among them, the longitudinal beam adopts wide and narrow beam design, 52 and 54 are narrow beams, and 53 and 55 are wide beams. The bending support beam 6 at the other end is structurally...

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Abstract

The invention discloses a heat-static strong recovering type MEMS (Micro-Electro-Mechanical System) four-point support hanging beam structure which comprises a substrate, static pull-down electrodes, anchor areas, a hanging main beam and bending support beams, wherein the top face of the substrate is coated with the static pull-down electrodes, the hanging main beam is hung above the substrate through the four anchor areas and the bending support beams; during the process that the hanging main beam switches from a pull-down state ('down' state) to a hanging state ('up' state), the bending support beams are subjected to ohmic heating to stretch the hanging main beam, so that the effective rigidity of the hanging main beam is improved, and the restoring force is strengthened; longitudinal beams of the bending support beams adopt the design of double parallel wide and narrow beams, so that the hanging main beam is more stable, and after being heated, the hanging main beam can recover from the 'down' state to the 'up' state more easily. The invention further discloses a specific operating manner for enhancing the restoring force, and the method is simple, convenient and feasible.

Description

technical field [0001] The invention relates to the field of reliability processing technology in the process of processing and using a micro-mechanical system (abbreviated as MEMS in the text). Specifically, it relates to a thermal-static strong recovery type MEMS four-point support suspension beam structure. Background technique [0002] MEMS is the abbreviation of Micro-Electro-Mechanical Systems (Micro-Electro-Mechanical Systems). MEMS mainly includes micro mechanisms, micro sensors, micro actuators and corresponding processing circuits. Many MEMS sensors and actuators include a movable structure, and use the movement of the movable structure to realize the conversion between electricity, heat, magnetism and machinery. Therefore, the kinematic performance of the movable structure is the key to the normal operation of MEMS devices. [0003] Many MEMS movable structures are cantilever beams, fixed beams or their combination. For electrostatically actuated movable beam ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/02
Inventor 唐洁影王磊蒋明霞
Owner SOUTHEAST UNIV
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