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A container with flexible joints

A technology of flexible joints and containers, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., and can solve problems such as difficulty in opening the lid and loose lid closure

Active Publication Date: 2019-07-09
ADVANCED MICRO FAB EQUIP INC CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a flexible switch to provide a better cover support device, which can overcome the problems of loose cover or difficult opening of the cover caused by size deviation

Method used

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  • A container with flexible joints
  • A container with flexible joints
  • A container with flexible joints

Examples

Experimental program
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Embodiment Construction

[0014] Embodiments of the present invention will be described in detail below with reference to FIGS. 1 to 3 .

[0015] Such as Figure 1a As shown, the container of the present invention includes a cavity body 10 and a cover body 20. One end of the cover body 20 is fixed to the cavity body through a hinge 12, and the other end rotates with the hinge. A support arm 33 includes a cylinder 30 and a support rod 31 , the first end of the cylinder, that is, the first end of the support arm 33 is connected to the cavity 10 through a fixed joint, and the other end of the cylinder is connected to the support rod 31 . The second end of the support arm is fixed to a flexible joint 32 connected to the cover 20 . Such as Figure 1a As shown in the figure, a clamping device 40 is included at or near the contact interface between the cavity and the cover to lock the cover when the cover and the cavity are in a closed state, and to enter Figure 1b In the open state, the lock is released an...

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PUM

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Abstract

The invention provides a container, which comprises a cavity body and a cover body. The cover body comprises a first part fixed onto the cavity body via a hinge and a second part moving relative to the cavity body along with rotation of the hinge. A support arm comprises a first end connected onto the cavity body and a second end connected onto the cover body via a flexible joint. The flexible joint comprises a main body and a central rotating shaft. The main body also comprises a centrifugal rotating shaft. The central rotating shaft is fixed on the cover body. The second end of the support arm is fixed on the centrifugal rotating shaft.

Description

technical field [0001] The invention relates to the field of mechanical connection parts for low-pressure containers, in particular to a connection joint for low-pressure containers. Background technique [0002] In the manufacturing process of semiconductor equipment, the reactor needs to be evacuated to a low pressure and close to a vacuum to process the substrate to form the required substrate structure. Other chemical or biotechnology reactors or containers that require a low-pressure environment need to be placed in the container cavity. The body and at least one cover realize the switch. The cover body fixes one end of the cover body with the cavity through the hinge, and the other end rotates and moves around the hinge, so that the cover body and the container have two states of opening and closing. The air in the container is evacuated or filled with the gas to be treated when closing until the required air pressure is obtained. When opening, the cover moves to rel...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
CPCH01L21/67155H01L21/6719
Inventor 虞龙斌陈妙娟徐朝阳王正友
Owner ADVANCED MICRO FAB EQUIP INC CHINA