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Clean room monitoring device and clean room monitoring method

A monitoring device and clean room technology, applied in engineering safety devices, televisions, instruments, etc., can solve problems such as falling and operators not noticing the opening

Inactive Publication Date: 2016-08-24
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is a possibility that accidents such as bollards, guardrails, etc. are not installed quickly when the grille is removed, and as a result, the operator falls from the opening without noticing the existence of the opening.
In addition, even if road posts, guardrails, etc. are installed, there is a possibility that an accident may occur such that an operator falls from the opening without noticing the existence of the road posts or guardrails.

Method used

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  • Clean room monitoring device and clean room monitoring method
  • Clean room monitoring device and clean room monitoring method
  • Clean room monitoring device and clean room monitoring method

Examples

Experimental program
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Effect test

Embodiment Construction

[0015] Hereinafter, an embodiment of a monitoring device for a clean room and a monitoring method for a clean room according to the present invention will be described with reference to the drawings.

[0016] figure 1 It is a block diagram showing a schematic configuration of a clean room monitoring device according to an embodiment of the present invention. Such as figure 1 As shown, the monitoring device 100 for a clean room includes a monitoring unit 101 including a computer, a monitoring camera 102 including a digital camera, and an alarm generating unit 103 that generates an alarm through light and an alarm sound. Among them, the alarm generating unit 103 includes, for example, a rotating lamp, a speaker for generating an alarm sound, and the like.

[0017] Such as figure 2 As shown, the monitoring camera 102 is mounted, for example, on the top of a semiconductor manufacturing apparatus 110 disposed in a clean room, and can photograph the floor surface (grid) of the c...

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Abstract

The present invention relates to a monitoring device for a clean room and a monitoring method for a clean room. This device is a monitoring device for monitoring a clean room inside a clean room in which a detachable grill is arranged on the floor. The device includes: a monitoring camera that photographs the above-mentioned grill; The image signal obtained by the above-mentioned monitoring camera is used to detect the presence or absence of the opening from which the above-mentioned grille has been removed, and if there is an opening, to detect the presence or absence of an operator approaching the opening, and when the above-mentioned operator is detected, an alarm signal is output; and an alarm generating unit receives the alarm signal from the monitoring unit and issues an alarm.

Description

technical field [0001] The present invention relates to a monitoring device for a clean room and a monitoring method for a clean room. Background technique [0002] Conventionally, for example, in a semiconductor production line for manufacturing semiconductor devices, many semiconductor manufacturing devices are arranged in a clean room with a clean environment. In such a clean room, a downward flow of clean air flowing from the ceiling toward the floor is formed inside, and the dust in the clean room is discharged to the outside by the flow of the downward flow. [0003] In such a clean room, in order to form the above-mentioned downflow, a grill having many openings is arranged on the floor. In addition, a space portion through which the downflow flows is provided at the lower portion of the grille. In addition, the grill can be detached, and in a state where the grill has been removed, an operator can enter the space below the grill to perform work. [0004] Since an ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G08B21/24G08B21/02G08B25/00
CPCF16P3/142H04N7/183G08B7/06G08B21/0407G08B21/0476G08B21/22G08B21/02
Inventor 铃木淳司鱼山和哉小西仪纪奥大辅本多庆匡
Owner TOKYO ELECTRON LTD