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Na dose control method

A dose control and content technology, applied in the field of solar cells, can solve problems such as limited Na dose control

Active Publication Date: 2018-04-20
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although Na doping has been found to improve the performance of CIGS solar cells, current control over Na dosage is limited

Method used

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  • Na dose control method
  • Na dose control method
  • Na dose control method

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Embodiment Construction

[0028] The following disclosure provides many different embodiments, or examples, for implementing different features of the subject matter. Specific examples of components and arrangements are described below to simplify the present disclosure. Of course, these are merely examples and are not intended to limit the invention. For example, in the following description, forming a first component over or on a second component may include an embodiment in which the first component and the second component are formed in direct contact, and may also include forming an embodiment between the first component and the second component. An embodiment in which an additional component may be formed between such that the first component and the second component may not be in direct contact. In addition, the present invention may repeat reference numerals and / or letters in various instances. This repetition is for the purposes of brevity and clarity, and does not in itself dictate a relati...

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Abstract

The present invention provides a Na dose control method, the method comprising: placing at least two substrates on a substrate carrier at a certain distance from each other, placing the substrate carrier in a reaction chamber, A precursor is deposited on the substrates, and a first annealing process is performed on the at least two substrates. The at least two substrates include a first content of the first material. The distance between at least two substrates is based on a first content of the first material and at least one process parameter. The disclosed methods advantageously provide improved Na dosage control.

Description

technical field [0001] The present invention relates generally to the field of semiconductor technology, and more particularly to solar cells. Background technique [0002] A solar cell is an electrical device that directly converts light energy into electricity through the photovoltaic effect. The battery is growing in popularity as energy efficiency improves and the world looks for energy sources that don't produce greenhouse gases. Some solar cells include copper indium gallium selenide ("CIGS") semiconductor material for thin film solar cells. Although Na doping has been found to improve the performance of CIGS solar cells, current control over Na dosage is limited. Contents of the invention [0003] In order to solve the defects existing in the prior art, according to an aspect of the present invention, a method is provided, comprising: placing at least two substrates on a substrate carrier with a certain distance from each other, the at least two substrates The bo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L31/0392
CPCH01L21/02568H01L21/02579H01L21/02614H01L31/0322H01L31/1876Y02E10/541H01L31/0323Y02P70/50H01L31/1864H01L31/1892H01L21/02299H01L21/02387Y02E10/50
Inventor 许丽李文钦
Owner TAIWAN SEMICON MFG CO LTD