Seawater conductivity sensor based on MEMS silicone-glass bonding process

A conductivity sensor and bonding process technology, applied in the direction of material resistance, can solve the problems of poor anti-pollution ability, low measurement accuracy, and high measurement cost of MEMS conductivity sensors, and achieve the goal of overcoming poor anti-pollution ability, small size, Versatile effect

Inactive Publication Date: 2016-03-09
HOHAI UNIV
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Problems solved by technology

[0004] The problem to be solved in the present invention is that the above-mentioned existing seawater conductivity measurement equipment is expensive, bulky, and high in measurement cost; the existing MEMS conductivity sensor has poor anti-pollution ability, has measurement errors, and has low measur

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  • Seawater conductivity sensor based on MEMS silicone-glass bonding process
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  • Seawater conductivity sensor based on MEMS silicone-glass bonding process

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[0028] The present invention will now be described in further detail with reference to the drawings. These drawings are all simplified schematic diagrams, which merely illustrate the basic structure of the present invention in a schematic manner, so they only show the structures related to the present invention.

[0029] Such as Figure 1-5 As shown, a seawater conductivity sensor based on the MEMS silicon-glass bonding process includes an insulating substrate 1, four metal electrodes, and a filter device 3. The filter device 3 is in the shape of a round cap and includes a hemispherical portion and The ring-shaped rim, the top of the hemispherical portion is provided with an array of filter holes 302, the filter device 3 is fixed on the upper end surface of the insulating substrate 1 through its ring-shaped rim, and the cavity formed between the filter device 3 and the insulating substrate 1 is conductive Cell 4, four metal electrodes are all set on the insulating substrate 1 in...

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Abstract

The invention discloses a seawater conductivity sensor based on an MEMS silicone-glass bonding process. The seawater conductivity sensor comprises an insulating substrate, four metal electrodes and a filter device. The filter device is in a round cap shape and comprises a hemisphere part and an annular edge part. A filter hole array is formed in the top of the hemisphere part. The filter device is fixed to the upper end face of the insulating substrate through the annular edge part. The cavity formed between the filter device and the insulating substrate serves as a conductance cell. The four metal electrodes are all arranged on the portion, in the conductance cell, of the insulating substrate and connected with an external test circuit through connection leads respectively. Compared with the prior art, the seawater conductivity sensor has the advantages that the defects that existing MEMS conductivity sensors are poor in anti-pollution capacity and low in measurement accuracy are overcome, the structure is simple, the size is small, the power consumption is low, cost is low, universality is high, and real-time and high-accuracy seawater conductivity measurement can be conveniently achieved.

Description

technical field [0001] The invention belongs to the field of micro-electro-mechanical system manufacturing, is suitable for marine measurement applications, and is especially suitable for real-time high-precision seawater conductivity measurement. It relates to a seawater conductivity sensor with a filter device, especially to a MEMS silicon-glass based sensor. Seawater conductivity sensor with bonding process. Background technique [0002] At present, ocean observation has been receiving extensive attention. Seawater conductivity is the most basic physical element of ocean water. Various phenomena and processes in the ocean, the survival and reproduction of marine organisms, and human maritime activities, including maritime military activities, are almost All are directly or indirectly related to the temporal and spatial distribution of seawater conductivity. [0003] In the prior art, the special testing equipment used for seawater conductivity measurement is expensive, b...

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Application Information

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IPC IPC(8): G01N27/07G01N27/08
CPCG01N27/07G01N27/08
Inventor 刘海韵冯芸陈嘉琪郭洁
Owner HOHAI UNIV
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