Furnace door device of diffusion furnace

A diffusion furnace and furnace door technology, applied in furnaces, furnace components, lighting and heating equipment, etc., can solve problems such as process exhaust gas leakage, and achieve the effects of alleviating corrosion, good protection, and simple and compact structure

Inactive Publication Date: 2016-04-20
HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] When the existing rotary furnace door of the diffusion furnace is opened or closed, the cylinder needs to push the furnace door to rotate around the suppo

Method used

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  • Furnace door device of diffusion furnace
  • Furnace door device of diffusion furnace
  • Furnace door device of diffusion furnace

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Embodiment Construction

[0022] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0023] Figure 1 to Figure 3 An embodiment of the furnace door device of the diffusion furnace of the present invention is shown. The furnace door device includes a door body 1, a bottom plate 2, an advance and retreat drive assembly 3 and a translation drive assembly 4. The advance and retreat drive assembly 3 is slid on the bottom plate 2 and translates The driving assembly 4 is slidably arranged on the advancing and retreating driving assembly 3 , and the door body 1 is connected with the translational driving assembly 4 . When the door body 1 changes from the open state to the closed state, the operation mode of the device is as follows: firstly, the advance and retreat drive assembly 3 is started, and at this time, the advance and retreat drive assembly 3 will drive the door body 1 to move toward the furnace tube through the tran...

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Abstract

The invention discloses a furnace door device of a diffusion furnace. The furnace door device comprises a door body, a bottom plate, an advance retreat driving assembly and a translation driving assembly, wherein the advance retreat driving assembly is arranged on the bottom plate in a sliding manner; the translation driving assembly is arranged on the advance retreat driving assembly in a sliding manner; and the door body is connected with the translation driving assembly. The furnace door device has the advantages of being simple and compact in structure, corrosion resistant and long in service lifetime.

Description

technical field [0001] The invention mainly relates to solar cell manufacturing equipment, in particular to a diffusion furnace door device. Background technique [0002] Diffusion is a crucial step in the manufacturing process of solar cells, so it is urgent to improve the reliability of the diffusion furnace. The existing diffusion furnace door adopts a rotary motion mode, which consists of a furnace door, a furnace door fixing plate, a rotary motion pair, a switch cylinder, It is composed of mounting plate, forward and backward cylinder, box type linear bearing and other components. The furnace door forms a rotary motion pair through the furnace door fixing plate and the mounting plate, and the switch cylinder installed on the mounting plate pushes the furnace door to rotate around the rotary motion pair to realize the opening and closing of the furnace door. [0003] When the existing rotary furnace door of the diffusion furnace is opened or closed, the cylinder needs t...

Claims

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Application Information

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IPC IPC(8): F27D1/18
CPCF27D1/1858
Inventor 张弥涛张春成谢振勇李晔纯成秋云
Owner HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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