Growth equipment and method thereof capable of achieving online annealing of single crystal

Abstract

The invention provides growth equipment and a method thereof capable of achieving online annealing of a single crystal. The growth equipment comprises a furnace body, a gas charging system, a vacuum system and an exhaust system. The annealing method comprises the following steps: putting a seed crystal, a polycrystalline material and boron oxide into a crucible, growing a single crystal bar by virtue of a vertical gradient temperature method, introducing chlorine after completion of growing, enabling the boron oxide attached to the surface of the single crystal bar to react with the chlorine to obtain a gas which is discharged out of a tank by virtue of a vacuum pump, and meanwhile performing annealing heating process on the single crystal bar to achieve online annealing of a growing single crystal.

Description

technical field [0001] The invention relates to a crystal growth preparation device, in particular to a growth device capable of realizing single crystal on-line annealing and a method thereof for III-V or II-IV compound semiconductor materials. Background technique [0002] After more than half a century of development, my country's artificial crystal material industry has made great achievements with the joint efforts of the majority of scientific and technological workers. It has a high technical level and a large production capacity. Growth equipment - single crystal furnace has also been developed rapidly. [0003] At present, the commonly used single crystal growth method is the vertical gradient solidification method, referred to as the VGF method. In the 1980s, Bell Laboratories in the United States first used the VGF method to prepare group III-V compounds. This method is to place the container containing the indium phosphide polycrystalline raw material vertically ...

AI Technical Summary

Problems solved by technology

[0006] However, the current mainstream furnaces can only grow single crystals, and additional annealing furnaces are required for single crystal annealing.

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