Environmental abnormality monitoring sensor based on nonlinear structure
An anomaly monitoring and non-linear technology, applied in the field of precision sensors, can solve the problems of single sensor measurement types, poor sensitivity, and difficult sensor processing, and achieve the effect of wide application range, low cost, and strong resistance to environmental interference
Active Publication Date: 2017-07-21
DALIAN UNIV OF TECH
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[0009] According to the above-mentioned technical problems such as the single measurement type of the existing sensor, the difficulty in processing the sensor, and the poor sensitivity, an environmental anomaly monitoring sensor based on a nonlinear structure is provided, which is a detection mechanism integrating excitation and sensing
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[0038] Using the structural parameters shown in Tables 1 to 3, experiments are carried out on the monitoring sensor of the present invention and the effects are explained. A sinusoidal voltage is applied to the excitation piezoelectric film 2 for excitation, such as figure 2 As shown, the excitation voltage amplitude is set to 22V. Within a certain range, as the excitation frequency gradually increases, the displacement of the perforated cantilever beam 3 is always small, but when the excitation frequency reaches a certain value, the nonlinear beam 6 (this In the embodiment, a cosine beam is taken as an example) bifurcation jumps occur, resulting in a large displacement. Depend on figure 2 It can be seen that the bifurcation frequency is 35.51 Hz. Next, keep the excitation voltage amplitude unchanged and the excitation frequency as 35.03Hz, excite the excitation piezoelectric film 2, and then gradually increase the adsorption mass. When the adsorbed mass exceeds the mass t...
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The invention provides an environmental abnormality monitoring sensor based on a nonlinear structure. The environmental abnormality monitoring sensor is characterized by including: a fixed end, an excitation piezoelectric film, a perforated cantilever beam, a detection piezoelectric film, an adsorption film and a nonlinear beam. One end of the perforated cantilever beam is fixed to the fixed end, the excitation piezoelectric film is connected to the perforated cantilever beam close to a position fixed to the fixed end, the other end, i.e. a free end of the perforated cantilever beam is equipped with holes, the nonlinear beam is connected above the holes, and the detection piezoelectric film and the adsorption film are connected to the upper surface of the nonlinear beam. When the adsorption film adsorbs a detected substance, the detection piezoelectric film output changes dramatically, thereby judging the dosage of the adsorbate. The monitoring sensor provided by the invention can be used for monitoring of gas concentration, microparticle mass and microorganisms, etc., and has the advantages of simple structure, quick response, high sensitivity and no damping influence, etc.
Description
technical field [0001] The invention belongs to the field of precision sensors, and in particular relates to an environmental abnormality monitoring sensor based on a nonlinear structure, which can be used for monitoring gas concentration, micro-particle quality and microorganisms. Background technique [0002] The linear resonant micro-mass sensor is mainly composed of a piezoelectric film and a cantilever beam. The change of the resonance frequency before and after the cantilever beam absorbs the measured object can accurately identify the quality of the measured object, that is, S=Δf / Δm, where S is the sensor sensitivity, Δm is the mass of the measured object, and Δf is the variation of the resonant frequency. Sensitivity is an important performance index to measure the resonant micro-mass sensor. The size, structure and working mode of the sensor all have a great influence on the sensitivity. In recent years, many researchers have improved the sensitivity of the sensor ...
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Login to View More IPC IPC(8): G01N5/02G01N15/00
CPCG01N5/02G01N15/00
Inventor赵剑高仁璟蔡圣添温芯
OwnerDALIAN UNIV OF TECH