Optical thin film LIDT (laser induced damage threshold) testing device and method based on light scattering

A technology of optical thin film and testing device, which is applied in the field of optical testing, can solve the problem that the laser damage threshold test of the optical element film layer cannot quickly and efficiently adapt to the requirements of enterprise assembly line, so as to save testing cost, solve inaccurate problems, and improve measurement accuracy. accurate effect

CN107271403AInactive Publication Date: 2017-10-20NANJING UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2017-10-20
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses an optical thin film LIDT (laser induced damage threshold) testing device based on light scattering. The device comprises a pulsed laser, a half wave plate, a Glan-Taylor prism, a convergent lens and a to-be-tested sample which are sequentially arranged along the co-optical axis, and the optical axis is a pulse beating optical axis; the device further comprises a semiconductor laser, a beam expander and an aperture diaphragm which constitute a co-optical axis testing light path, the optical axis is a testing optical axis, the included angle alpha is formed between the testing optical axis and the pulse beating optical axis, and testing light emitted by the semiconductor laser irradiates the front surface of the to-be-tested sample after passing through the beam expander and the aperture diaphragm, is scattered by the front surface of the to-be-tested sample and is received by a CCD detector; pulse laser emitted by the pulsed laser passes through the half wave plate to reach the Glan-Taylor prism and is reflected and transmitted by the Glan-Taylor prism, and transmission light is converged to the to-be-tested sample by the convergent lens. The device is more stable and efficient, suitable to be used and set up in an optical plant, low in cost and convenient to operate.
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Description

technical field

[0001] The invention belongs to the field of optical testing, and in particular relates to a light scattering-based optical film LIDT (laser damage threshold) testing device and testing method. Background technique

[0002] With the development of carbon dioxide lasers, chemical lasers, slab lasers and fiber lasers and other types of lasers, new breakthroughs have been made in laser power, and the application range of high-power lasers has been expanding. As an optical system and some internal components of lasers, optical thin films have always been the bottleneck that limits the power increase, and the determination and improvement of laser damage of optical thin films has always been a key technology in high-power laser systems.

[0003] The International Standards Institute promulgated the ISO 11254 laser damage threshold test standard for optical surfaces (thin films) as early as 1995. However, due to the need for Nomarski phase-contrast microscopes, spo...

Examples

Embodiment 1

[0043] The technical solution adopted in the present invention is to irradiate the CCD detector 10 with scattered light, and to process and analyze the grayscale image of the obtained image: starting from two aspects of non-contact measurement and image processing, the optical thin film is improved in the pulsed laser The judgment accuracy of the damage threshold value under the impact; first place the sample 6 to be tested on the deck to ensure that the laser light is perpendicular to the film surface of the sample 6 to be tested; then change the angle of the half-wave plate 2 to change the laser pulse of the pulse laser 1 The angle of incidence is used to obtain the damage on the surface of the sample 6 film to be tested under different intensities of laser light; another semiconductor laser 8 is used to irradiate the front surface of the sample 6 to be tested, and the CCD detector 10 collects the LIDT scattered light of the sample 6 film to be tested under different laser int...