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An Improved Vapor Deposition Furnace

A technology of vapor deposition and air intake device, which is applied in the direction of gaseous chemical plating, metal material coating process, coating, etc. The effect of rapid increase of internal temperature, uniform and sufficient chemical reaction, and reduction of material cost

Active Publication Date: 2019-06-21
烟台奥森制动材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Over time, the hole diameter of the pipeline will become smaller and smaller, which will affect the pumping effect. Once the pipeline is blocked, there will be an explosion hazard
It is time-consuming and laborious to disassemble the pipeline for cleaning, which increases the maintenance cost

Method used

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  • An Improved Vapor Deposition Furnace
  • An Improved Vapor Deposition Furnace
  • An Improved Vapor Deposition Furnace

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Embodiment Construction

[0031] The present invention will be further described below in conjunction with the accompanying drawings and examples.

[0032] Such as figure 1 , The embodiment of the improved vapor deposition furnace of the present invention includes a furnace body 1 with a furnace bottom 4, a dedicated inner cylinder 2 is installed in the furnace body 1, and an air inlet device 6 is connected to the dedicated inner cylinder 2. The embodiment of the present invention also includes a bottom heating device 5 , a circulating cooling device 7 and a tail gas decoking device 3 .

[0033] Such as Figure 5 and Figure 6 , the embodiment of the special inner cylinder 2 of the present invention includes an inner cylinder upper ring 21 at the upper end and an inner cylinder lower ring 22 at the lower end, and the inner surface between the inner cylinder upper ring 21 and the inner cylinder lower ring 22 is a smooth surface The cylinder wall, the cylinder wall includes criss-cross ribs 23, and wall...

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Abstract

The invention relates to an improved vapor deposition furnace which comprises a furnace body provided with a furnace bottom, a bottom heating device, a circulation cooling device and a tail gas decoking device, wherein a special inner cylinder is mounted in the furnace body, and connected with a gas inlet device. According to the improved vapor deposition furnace, the structural shape of a cylinder wall is improved, the bottom heating device is increased, and a gas inlet manner is improved, so that purposes of uniform and rapid heating and material saving are achieved; forced cooling in the furnace is realized; the cooling time of the furnace body is greatly shortened; and tar attached on an inner wall of an exhaust pipeline and a filter screen can be timely removed.

Description

technical field [0001] The invention relates to the technical field of vapor deposition furnaces, in particular to an improved vapor deposition furnace. Background technique [0002] The chemical vapor deposition method is a common method for preparing carbon / carbon composite materials. It is to pass hydrocarbon gas into the deposition furnace, and under the condition of about 1000 ℃, the pyrolytic carbon will continue to grow on the surface of the carbon fiber, and finally the fiber braid will be densified. Forming a carbon fiber reinforced pyrolytic carbon matrix composite material has the characteristics of simple process, stable product performance, product not limited by geometric shape, and adaptable to industrial scale production. [0003] The furnace inner cylinder of the existing vapor deposition furnace is made of carbon / carbon composite material, and the wall thickness is generally uniform, and the wall thickness of one side is mostly 50 mm. When the resistance i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/455C23C16/46C23C16/44
CPCC23C16/4407C23C16/455C23C16/46
Inventor 历建政
Owner 烟台奥森制动材料有限公司