Spectral analysis chip and preparation method thereof

Abstract

The invention discloses a spectral analysis chip and a preparation method thereof. The spectral analysis chip comprises a silicon substrate layer, a quantum dot photosensitive film, and an optical antenna from down to up, wherein the optical antenna is an array obtained by periodically arranging a metal nano structure, and the spectral analysis chip also comprises at least a pair of photoelectricdetectors formed by metal electrodes contacted with the quantum dot photosensitive film. The preparation method of the detection chip comprises the following steps: preparing optical antenna; preparing the quantum dot photosensitive film; and producing the electrodes for chip preparation. The method uses cooperated cooperation between the metal nano structure and the quantum dot photosensitive film, and uses the filtering of the optical antenna, the light field enhancement function and the quantum confinement effect of the quantum dot, wavelength modulation and sensitization can be carried outon photoelectric response of the quantum dot photosensitive film, a tunable photoelectric detector unit with high sensitivity and narrow passband can be realized, and the high-sensitivity spectral analysis chip is subjected to integrated preparation.

Description

technical field [0001] The invention belongs to the technical field of photoelectric detection, and more specifically relates to a spectrum analysis chip and a preparation method thereof. The chip includes a quantum dot photosensitive film integrated with an optical antenna. Background technique [0002] Spectral analysis is a means of detecting the type, composition and other chemical composition and relative content of substances by detecting the characteristic absorption or emission spectra of molecules and atoms. It plays an important role in many fields of military and national economy. Traditional spectral analysis uses a full-spectrum detector with a preset range, which needs to split the light source, which greatly limits the miniaturization of the equipment. In recent years, handheld spectral analysis and detection equipment is being popularized in various fields of spectral analysis, but light sources and detectors still limit the miniaturization and low cost of sp...

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Problems solved by technology

CN107037017A discloses a quantum dot spectrometer used in biomedical devices, which uses the characteristics of fuel-sensitized quantum dots to luminescent and surface adjustable, combined with microfluidic technology, and detects the fluorescence quenching of dye-sensitized quantum dots to target objects Spectral analysis, but the detection method still uses the traditional photodetector to receive the optical signal emitted by the quantum dot light, which does not have the characteristics of high sensitivity, narrow passband and tunable, and the spectral analysis capability is limited

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