Manufacturing method of array substrate, array substrate and display panel

Abstract

The invention discloses a manufacturing method of an array substrate, the array substrate and a display panel, and belongs to the technical field of display. The method comprises the following steps:sequentially forming an active layer, a first gate insulating layer and a first gate electrode on a substrate; forming a second gate insulating layer on the substrate on which the first gate electrodeis formed, wherein the second gate insulating layer includes a first sub-insulating layer and a second sub-insulating layer arranged in a direction away from the active layer, and the hydrogen content of the first sub-insulating layer is greater than the hydrogen content of the second sub-insulating layer; and carrying out hydrogenation treatment on the active layer. According to the manufacturing method of the array substrate provided by the invention, the first sub-insulating layer with relatively large hydrogen content and the second sub-insulating layer with relatively small hydrogen content are formed, so that in the hydrogenation treatment process, hydrogen can diffuse better towards the active layer, thereby improving the distribution of the hydrogen concentration gradient towardsthe direction of the active layer, and improving a hydrogenation effect on the active layer; and in addition, the problem of affecting the electrical properties of the active layer in the related technology is solved, and the effect of improving the electrical properties of the active layer is achieved.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to a method for manufacturing an array substrate, an array substrate and a display panel. Background technique [0002] A display panel generally includes an array substrate and various display structures disposed on the array substrate. Flexible display panels are a current development trend, but various inorganic films in the array substrate limit the flexibility of the display panel due to their own materials. [0003] A method for manufacturing an array substrate in the related art may include: 1. Forming a low temperature polysilicon (English: Low Temperature Poly-silicon; LTPS for short) sequentially on a base substrate to form an active layer, a first gate insulating layer, a second A gate, a second gate insulating layer, and a second gate; 2. Hydrogenation is performed on the active layer in the base substrate on which the second gate is formed by a solid-state dif...

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Problems solved by technology

[0005] Embodiments of the present invention provide a method for manufacturing an array substrate, an array substrate, and a display panel, which can solve the problem of insufficient hydrogenation of the active layer in the related art, which in turn affects the electrical properties of the active layer

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