Contact or non-contact composite principle nano-sensing method and device
A technology of sensing device and sensing method, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problem of not giving the mechanical structure of the probe, signal transmission shielding interference, and the inability to realize the actual engineering measurement of the large aspect ratio structure, Problems such as inability to measure non-conductor DUTs
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[0038] figure 2 As another embodiment of the present invention, the measurement drive mechanism 5 drives the object under test 15 . Fix the test piece 15 on the measurement drive mechanism 5, and the test drive mechanism 5 drives the test piece 15 close to the micro-probe 6 of the composite principle probe 1 to complete the measurement. The composite principle probe 1 is connected and fixed with the probe attitude adjustment mechanism 3 and the anti-collision safety protection mechanism 4, and can be installed on the Z-axis motion mechanism of the coordinate machine for easy measurement.
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