Ultraviolet treatment method and system

A treatment method and a treatment system technology, applied in the field of liquid treatment by ultraviolet rays, can solve the problems of large-scale equipment and huge energy

Pending Publication Date: 2020-06-05
PHOTOSCI JAPAN CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, although these conventional UV oxidation devices can decompose many kinds of organic substances, for example, in order to decompose urea, a huge amount of energy is required, and the scale of the device used for UV irradiation becomes large.

Method used

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  • Ultraviolet treatment method and system
  • Ultraviolet treatment method and system

Examples

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Embodiment Construction

[0024] figure 1 It is a block diagram schematically showing one embodiment of the ultraviolet treatment system and method of the present invention, which are applied to, for example, an ultrapure water production system. Ultraviolet (UV) irradiation device 10 is the equipment that is used to treat water to be treated with ultraviolet (UV), and is equipped with more than one UV lamp 11 as ultraviolet light source in airtight container 10a, will radiate from UV lamp 11. UV is irradiated to the water to be treated flowing into the container 10a from the supply port 10b, and the UV-treated water is discharged from the discharge port 10c. The injection device 12 arranged at the front stage of the UV irradiation device 10 is used to inject persulfate (ie, peroxodisulfate) and metal ions into the water to be treated, and make these persulfate (peroxodisulfate) and A device that dissolves metal ions in the water to be treated. As persulfate (peroxodisulfate), for example, potassium ...

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Abstract

Metal ions other than peroxodisulfate and alkali metal ions are dissolved in the water to be treated by the injection equipment (12). The water to be treated after dissolving the metal ions other thanthe peroxodisulfate and the alkali metal ions is treated with ultraviolet rays by an ultraviolet irradiation device (10). By performing UV treatment on the water to be treated after dissolving the peroxodisulfate and metal ions, the TOC decomposition performance is improved, and in particular, the decomposition of urea components can be favorably performed. Furthermore, it can be treated with ionexchange resin in the later stage, and the organic acid contained in the treated water after the UV treatment has been completed is adsorbed, which can further reduce the TOC concentration.

Description

technical field [0001] The present invention relates to an ultraviolet treatment method and system that uses ultraviolet (UV) for liquid treatment, especially suitable for ultrapure water production, and especially relates to the decomposition of organic matter dissolved in treated water. Background technique [0002] In semiconductor and FPD (Flat Panel Display) factories, ultrapure water is used in the manufacturing process of products. The water quality items of this ultrapure water include the number of live bacteria and TOC (total organic carbon) concentration. As a device for inactivating microorganisms, a UV sterilizing device was used, and as one of devices for reducing the TOC concentration, a UV oxidizing device was used. These devices accommodate one or more low-pressure mercury lamps emitting ultraviolet light of 254 nm light and / or 185 nm light in a cylindrical reaction container. The lamp is individually inserted into a lamp protection tube made of quartz so ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C02F1/32C02F101/30C02F103/04
CPCC02F1/32C02F2101/30C02F2103/04C02F1/42C02F2303/04C02F2305/023C02F1/325C02F2201/3222C02F2201/3226C02F1/722C02F1/725C02F1/58C02F2201/32
Inventor 中村知克山越裕司
Owner PHOTOSCI JAPAN CORP
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