Multi-degree-of-freedom sample rod with self-positioning function

Abstract

The invention discloses a multi-degree-of-freedom sample rod with a self-positioning function. The sample rod comprises a shell and a rotating shaft, wherein the shell is coaxial with the rotating shaft, the shell is provided with an inner cavity, the rotating shaft is positioned in the inner cavity of the shell, and a self-positioning mechanism is arranged in the inner cavity. The sample rod is advantaged in that no matter how the rotating shaft rotates, a central shaft of the rotating shaft can always automatically reset to the original position due to the action of the self-positioning mechanism so that a to-be-observed area of the sample is prevented from being separated from the observation visual field of a transmission electron microscope due to central displacement of the rotatingshaft.

Description

Technical field [0001] The invention relates to a sample rod used under an electron microscope and a transmission electron microscope. Background technique [0002] Transmission electron microscopy (TEM) can see fine structures smaller than 0.2μm that cannot be seen under ordinary optical microscopes. These structures are called submicroscopic structures or ultrastructures. In 1932, Ruska invented a transmission electron microscope with electron beam as the light source. The current resolution of TEM can reach 0.2nm. [0003] In-situ observation technology has a long history in transmission electron microscopy research. By applying various physical effects on the sample, using a transmission electron microscope (transmission electron microscope) to observe the changes in the microstructure and chemical state of the material, you can intuitively study the performance of the material or device in the actual use process, and the performance of the material Research has important pra...

AI Technical Summary

Problems solved by technology

[0005] The disadvantages of this three-dimensional probe are: 1. The flexible claw is easy to deform. In order to maintain the friction between it and the ball, the shape of the flexible claw needs to be adjusted frequently, but there are many flexible claws, and it is impossible to ensure that each The consistency of the flexible wire claws, resulting in the lower and lower reliability and accuracy of the three-dimensional probe with the time and frequency of use

2. The length of the flexible wire claw makes there is a gap between the sample holder and the ball. When the ball circulates, the sample holder will move away from the ball or close to the ball along the wire claw, so as to realize the axial displacement of the sample. , but the sample holder is suspended on the ball through flexible wire claws, the sample holder and the sample on it will fall down due to gravity, and the position accuracy is not high

The observation field of view in the transmission electron microscope is at the nanometer and micron level, and the position deviation of the sample due to gravity is likely to cause the area to be observed on the sample to deviate from the observation field of view of the electron microscope and cannot be observed; and the existence of position deviation makes it difficult to place the sample Adjust the area to be observed to a suitable position and angle for observation

3. When the probe clamping device moves back and forth along the axial direction of the piezoelectric ceramic tube, the relationship between the shape of the flexible wire claw and the above-mentioned frictional force is complicated, and it is difficult to ensure that the frictional force is always suitable by adjusting its shape

In addition, the probe clamping device is affected by gravity, which makes it easy to generate coupling motion during rough adjustment, and it is difficult to accurately control the probe; even due to improper adjustment of the shape of the flexible wire claw, the small ball cannot be grasped, which may cause the probe to clamp The device falls into the device, causing damage to the device

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