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Mems microphone trimming device and trimming method

A microphone and trimming technology, which is applied in the trimming field, can solve the problem that the sensitivity of MEMS microphones cannot be highly consistent, and achieve the effect of improving the trimming efficiency

Active Publication Date: 2021-09-24
无锡感芯科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide an improved trimming method and trimming device to solve the technical problem that the sensitivity of MEMS microphones cannot be highly consistent in the prior art

Method used

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  • Mems microphone trimming device and trimming method
  • Mems microphone trimming device and trimming method
  • Mems microphone trimming device and trimming method

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Embodiment Construction

[0022] Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings. In the various figures, identical elements are indicated with similar reference numerals. For the sake of clarity, various parts in the drawings have not been drawn to scale. Also, some well-known parts may not be shown. For the sake of simplicity, the semiconductor structure obtained after several steps can be described in one figure.

[0023] It should be understood that when describing the structure of a device, when a layer or a region is referred to as being "on" or "over" another layer or another region, it may mean being directly on another layer or another region, or Other layers or regions are also included between it and another layer or another region. And, if the device is turned over, the layer, one region, will be "below" or "beneath" the other layer, another region.

[0024] If it is to describe the situation directly on another layer or an...

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Abstract

The present application discloses a trimming device and a trimming method of a MEMS microphone. The trimming method includes: obtaining the initial sensitivity of the MEMS microphone according to the first output signal provided by the MEMS microphone; matching first data; and burning the first data into the MEMS microphone, wherein the gain value of the MEMS microphone is configured by the first data, so that the sensitivity of the MEMS microphone is configured in within the preset range. The trimming method configures corresponding gain values ​​for different MEMS microphones, so that the sensitivities of all MEMS microphones are within a preset range, so that the sensitivities of all the trimmed MEMS microphones achieve a highly consistent effect.

Description

technical field [0001] The present invention relates to a trimming technology, and more specifically, to a trimming device and a trimming method for a MEMS microphone. Background technique [0002] Silicon microphones are microphones based on Micro-Electro-Mechanical System (MEMS) technology. Compared with the polymer material diaphragm of the traditional electret capacitor microphone (Electret Capacitance Microphone, ECM), the MEMS microphone operates at different temperatures The performance is very stable under all conditions, and its sensitivity is not affected by temperature, vibration, humidity and time. However, the MEMS microphone requires an external bias voltage provided by an ASIC chip (Application Specific Integrated Circuit, ASIC), while the ECM does not. An effective bias voltage will keep the acoustic and electrical parameters of the MEMS microphone stable over the entire operating temperature range, and also support microphone designs with different sensitiv...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04R29/00H04R19/00H04R19/04
CPCH04R19/005H04R19/04H04R29/004
Inventor 刘宏志
Owner 无锡感芯科技有限公司
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