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MEMS microphone trimming device and MEMS microphone trimming method

A microphone and trimming technology, applied in the trimming field, can solve the problem of the inability of MEMS microphones to be highly consistent in sensitivity, and achieve the effect of improving trimming efficiency

Active Publication Date: 2020-08-07
无锡感芯科技有限公司
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  • Summary
  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide an improved trimming method and trimming device to solve the technical problem that the sensitivity of MEMS microphones cannot be highly consistent in the prior art

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  • MEMS microphone trimming device and MEMS microphone trimming method
  • MEMS microphone trimming device and MEMS microphone trimming method
  • MEMS microphone trimming device and MEMS microphone trimming method

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Embodiment Construction

[0023] Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings. In the various figures, identical elements are indicated with similar reference numerals. For the sake of clarity, various parts in the drawings have not been drawn to scale. Also, some well-known parts may not be shown. For the sake of simplicity, the semiconductor structure obtained after several steps can be described in one figure.

[0024] It should be understood that when describing the structure of a device, when a layer or a region is referred to as being "on" or "over" another layer or another region, it may mean being directly on another layer or another region, or Other layers or regions are also included between it and another layer or another region. And, if the device is turned over, the layer, one region, will be "below" or "beneath" the other layer, another region.

[0025]If it is to describe the situation directly on another layer or ano...

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PUM

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Abstract

The invention discloses an MEMS microphone trimming device and an MEMS microphone trimming method. Each MEMS microphone provides an output signal according to a bias voltage and a gain, and the trimming test method comprises the following steps: burning first configuration data to a first group of MEMS microphones, so that the bias voltage and the gain of each MEMS microphone in the first group ofMEMS microphones are configured by the first configuration data; for the first group of MEMS microphones, obtaining the sensitivity of the MEMS microphone according to the output signal provided by each MEMS microphone; selecting matched second configuration data according to the sensitivity of each MEMS microphone in the first group of MEMS microphones; and burning the second configuration datato a second group of MEMS microphones, the bias voltage and the gain being configured by the second configuration data for each MEMS microphone in the second group of MEMS microphones, so that the sensitivity of the MEMS microphone is configured within a preset range.

Description

technical field [0001] The present invention relates to a trimming technology, and more specifically, to a trimming device and a trimming method for a MEMS microphone. Background technique [0002] Silicon microphones are microphones based on Micro-Electro-Mechanical System (MEMS) technology. Compared with the polymer material diaphragm of the traditional electret capacitor microphone (Electret Capacitance Microphone, ECM), the MEMS microphone operates at different temperatures The performance is very stable under all conditions, and its sensitivity is not affected by temperature, vibration, humidity and time. However, MEMS microphones require an external bias provided by an ASIC (Application Specific Integrated Circuit, ASIC), while an ECM does not have such a bias. Effective biasing will keep the acoustic and electrical parameters of the MEMS microphone stable over the entire operating temperature range, and also support microphone designs with different sensitivities. W...

Claims

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Application Information

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IPC IPC(8): H04R29/00H04R19/00H04R19/04
CPCH04R19/005H04R19/04H04R29/004
Inventor 刘宏志
Owner 无锡感芯科技有限公司
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