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Photoinduction array substrate, preparation method thereof and display

An array substrate and light sensing technology, applied in the fields of instruments, optics, semiconductor devices, etc., can solve the problems of switching thin film transistor leakage current, low light absorption, low light absorption, etc., to improve light absorption efficiency and meet high-efficiency light absorption. Effect

Active Publication Date: 2021-02-26
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Problems solved by technology

Therefore, if one wants to improve the performance of the photosensitive array substrate, it is necessary to increase the absorption of the sensor thin film transistor to the external light source (such as laser), but the switch thin film transistor itself has a low absorption requirement for the light source, because higher light absorption will lead to Switching thin film transistors generate leakage current. Therefore, how to simultaneously meet the requirements of high-efficiency light absorption of sensor thin film transistors and low light absorption of switching thin film transistors in the photosensitive array substrate is a technical problem that needs to be overcome.

Method used

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  • Photoinduction array substrate, preparation method thereof and display
  • Photoinduction array substrate, preparation method thereof and display
  • Photoinduction array substrate, preparation method thereof and display

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Embodiment Construction

[0053] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0054] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the pr...

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Abstract

The invention discloses a photoinduction array substrate, a preparation method thereof and a display. Photoresist patterns with different thicknesses are prepared in the area for preparing the sensorthin film transistor and the switch thin film transistor, the sensor thin film transistor is provided with the molybdenum disulfide layer through etching, and the switch thin film transistor is free of the molybdenum disulfide layer. The light absorption of the sensor thin film transistor can be improved, the switch thin film transistor is not influenced, and the requirements of high-efficiency light absorption of the sensor thin film transistor and low light absorption of the switch thin film transistor can be met at the same time.

Description

technical field [0001] The invention relates to the technical field of displays, in particular to a photosensitive array substrate, a preparation method thereof, and a display. Background technique [0002] Thin film transistor liquid crystal display (TFT-LCD) is widely used in the current flat panel display industry because of its light, thin, small and other characteristics, low power consumption, no radiation, and relatively low manufacturing cost. In order to broaden the commercial and household functions of liquid crystal displays, many functions are now integrated into the display, such as color temperature sensing, external light source (such as laser) sensing, gas sensing, etc., which improves the application scenarios of liquid crystal displays. However, many integrated functions are in the new development stage, and there are still many processes and related designs that need to be improved in order to improve the performance of various integrated function LCDs. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/146G02F1/1362
CPCH01L27/1461H01L27/14616H01L27/14632H01L27/14687H01L27/14689H01L27/14692G02F1/1362Y02P70/50
Inventor 王海军江淼张鑫姚江波
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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