Initiating explosive device transduction element integrated with radio frequency and electrostatic protection device

A technology for electrostatic protection devices and transducer elements, which is applied to electric solid devices, electrical components, semiconductor devices, etc., and can solve the problems of difficult control of process parameters and complex process fabrication.

Pending Publication Date: 2021-04-23
浙江华泉微电子有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this solution has disadvantages such as complex process and difficult control of process parameters.

Method used

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  • Initiating explosive device transduction element integrated with radio frequency and electrostatic protection device
  • Initiating explosive device transduction element integrated with radio frequency and electrostatic protection device
  • Initiating explosive device transduction element integrated with radio frequency and electrostatic protection device

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Embodiment Construction

[0031] The technical solutions provided by the present invention will be further described below in conjunction with the accompanying drawings.

[0032] see figure 1 , which is a schematic structural diagram of a pyrotechnic transducer element integrated with radio frequency and electrostatic protection devices provided by the present invention, which at least includes a substrate layer and an epitaxial layer formed on the substrate layer, and two epitaxial layers are formed in the epitaxial layer An independent injection region is used to form two PN junctions; an insulating layer is arranged on the epitaxial layer and a gap is formed on the injection region; a transducing element is arranged on the insulating layer and electrically connected to the injection region to make the two PN junctions Junctions form parallel branches, and the transducer elements form electrode layers for connection with external circuits.

[0033] Among the above-mentioned technical solutions, ther...

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Abstract

The invention discloses an initiating explosive device transduction element integrated with a radio frequency and electrostatic protection device. The transduction element at least comprises a substrate layer and an epitaxial layer formed on the substrate layer, and two independent injection regions are formed in the epitaxial layer to form two PN junctions; an insulating layer is arranged on the epitaxial layer, and a notch is formed in the injection region; and the insulating layer is provided with a transduction element and is electrically connected with the injection region, so that the two PN junctions form a parallel branch, and the transduction element forms an electrode layer to be connected with an external circuit. According to the invention, an epitaxial wafer structure is adopted, the epitaxial layer is punctured through a punch-through breakdown mechanism, and bypass protection is implemented through short circuit of the heavily doped substrate. Due to the fact that different punch-through protection mechanisms are adopted, the needed epitaxial wafer thickness and resistivity can be customized for professional epitaxial wafer suppliers according to requirements to reach the needed protection voltage, and the control requirement of subsequent integrated initiating explosive device manufacturing for technological parameters is simplified.

Description

technical field [0001] The invention relates to the technical field of pyrotechnics transducer elements, in particular to a pyrotechnics transducer integrated with radio frequency and electrostatic protection devices. Background technique [0002] The pyrotechnic product is the starting element of the fire-and-explosion sequence in the weapon system. It has the characteristics of function starting, action sensitivity, wide use and one-time action, and determines the ultimate effectiveness of the weapon system. Therefore, safety reliability is an important index to measure and evaluate the performance of pyrotechnic products. [0003] In order to solve the safety and reliability problems of pyrotechnics in the electromagnetic environment, the United States has formulated a series of standards for the anti-electromagnetic interference capabilities of weapon systems and pyrotechnics since the 1960s. Mil-STD-461C will The connotation of the environment is defined as electromagn...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): H01L27/02
CPCH01L27/0255H01L27/0288H01L27/0296
Inventor何兆军
Owner浙江华泉微电子有限公司