Trace element detection device and method based on labeling technology

A technology for trace elements and detection devices, which is applied in the field of trace element detection devices based on standard addition technology, can solve the problems of easy contamination and large influence of human factors, and achieves improved accuracy, simple structure, reduced cross-contamination and The effect of the difficulty of cleaning

Pending Publication Date: 2021-12-03
HANGZHOU PUYU TECH DEV CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are many sample pretreatment processes. The same sample needs to be divided into at least 3-5 parts, and standard solutions of different concentrations are manually added to the sample and mixed. The process is very easy to pollute and is greatly affected by human factors.

Method used

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  • Trace element detection device and method based on labeling technology

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Embodiment 1

[0034] The trace element detection device based on the standard addition technology according to the embodiment of the present invention, the trace element detection device based on the standard addition technology includes:

[0035] An analysis unit and a first pipeline, the analyte enters the analysis unit through the first pipeline, such as ICP-MS;

[0036] a marker applying unit, the marker applying unit is used to add markers to the analyte in the first pipeline;

[0037] a speed sensor, the speed sensor is used to detect the speed of the marker in the first pipeline to obtain the sampling speed of the analyte;

[0038] a second pipeline, one end of the second pipeline communicates with the first pipeline between the analysis unit and the speed sensor, and the other end communicates with the delivery unit;

[0039] A conveying unit, the conveying unit is used to push the standard liquid at different adding speeds, and the standard liquid enters the first pipe from the se...

Embodiment 2

[0063] An application example of the trace element detection device and method based on the standard addition technology in the semiconductor industry according to Embodiment 1 of the present invention.

[0064] In this application example, the analysis unit adopts ICP-MS; the speed sensor includes a first photoelectric sensor, a second photoelectric sensor and a calculation module, and the two photoelectric sensors are sequentially arranged on the first pipeline; the marker applying unit adopts a gas pipeline and a second photoelectric sensor. The combination of the two valves, the marker is gas (not limited to this, as long as the speed sensor can identify it), and when the gas enters the object to be tested in the first pipeline, it becomes a bubble; the delivery unit includes a temporary storage module and a delivery pump, The temporary storage module adopts a buffer ring, and the transfer pump adopts a syringe pump. The liquid storage volume of the buffer ring is the same as...

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PUM

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Abstract

The invention provides a trace element detection device and method based on a labeling technology, the trace element detection device based on the labeling technology comprises an analysis unit and a first pipeline, and a to-be-detected object passes through the first pipeline and enters the analysis unit; a marker applying unit is used for adding a marker into an object to be detected in the first pipeline; a speed sensor is used for detecting the speed of the marker in the first pipeline so as to obtain the sample injection speed of the to-be-detected object; one end of a second pipeline is communicated with the first pipeline between the analysis unit and the speed sensor, and the other end of the second pipeline is communicated with the conveying unit; and a conveying unit is used for pushing the standard liquid at different standard adding speeds, and the standard liquid enters the first pipeline from the second pipeline. The device has the advantages of high detection precision, automation and the like.

Description

technical field [0001] The invention relates to liquid monitoring, in particular to a trace element detection device and method based on standard addition technology. Background technique [0002] Semiconductor companies need to strictly control pollution sources, which cause about 50% of production loss. There are many kinds of chemicals in the manufacturing process. The inorganic ones include strong acids such as hydrochloric acid, hydrogen peroxide, sulfuric acid, and hydrofluoric acid, and the mixed solution of cleaning solutions SC-1 and SC-2. The organic ones include methanol and isopropanol. The matrix of each chemical is inconsistent, and the required detection element concentration is at the ng / L level. Although the current detection method is the precision instrument Inductively Coupled Plasma Mass Spectrometer (ICP-MS), the preparation process of the standard solution and the sample analysis process are different. May introduce pollution; [0003] The detection ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/62G01N1/38
CPCG01N27/62G01N1/38
Inventor 卢水淼胡建坤夏晓峰张冰冰刘昌盛姚则庆
Owner HANGZHOU PUYU TECH DEV CO LTD
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