Trace element detection device and method based on labeling technology

A technology for trace elements and detection devices, which is applied in the field of trace element detection devices based on standard addition technology, can solve the problems of easy contamination and large influence of human factors, and achieves improved accuracy, simple structure, reduced cross-contamination and The effect of the difficulty of cleaning
CN113740409APending Publication Date: 2021-12-03HANGZHOU PUYU TECH DEV CO LTD
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
HANGZHOU PUYU TECH DEV CO LTD
Publication Date
2021-12-03

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Abstract

The invention provides a trace element detection device and method based on a labeling technology, the trace element detection device based on the labeling technology comprises an analysis unit and a first pipeline, and a to-be-detected object passes through the first pipeline and enters the analysis unit; a marker applying unit is used for adding a marker into an object to be detected in the first pipeline; a speed sensor is used for detecting the speed of the marker in the first pipeline so as to obtain the sample injection speed of the to-be-detected object; one end of a second pipeline is communicated with the first pipeline between the analysis unit and the speed sensor, and the other end of the second pipeline is communicated with the conveying unit; and a conveying unit is used for pushing the standard liquid at different standard adding speeds, and the standard liquid enters the first pipeline from the second pipeline. The device has the advantages of high detection precision, automation and the like.
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Description

technical field

[0001] The invention relates to liquid monitoring, in particular to a trace element detection device and method based on standard addition technology. Background technique

[0002] Semiconductor companies need to strictly control pollution sources, which cause about 50% of production loss. There are many kinds of chemicals in the manufacturing process. The inorganic ones include strong acids such as hydrochloric acid, hydrogen peroxide, sulfuric acid, and hydrofluoric acid, and the mixed solution of cleaning solutions SC-1 and SC-2. The organic ones include methanol and isopropanol. The matrix of each chemical is inconsistent, and the required detection element concentration is at the ng / L level. Although the current detection method is the precision instrument Inductively Coupled Plasma Mass Spectrometer (ICP-MS), the preparation process of the standard solution and the sample analysis process are different. May introduce pollution;

[0003] The detection ...

Claims

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