50results about How to "Avoid dead volume" patented technology

An apparatus and method for fabricating a semiconductor device using a 4-way valve with improved purge efficiency by improving a gas valve system by preventing dead volume from occurring are provided. The apparatus includes a reaction chamber in which a substrate is processed to fabricate a semiconductor device; a first processing gas supply pipe supplying a first processing gas into the reaction chamber; a 4-way valve having a first inlet, a second inlet, a first outlet, and a second outlet and installed at the first processing gas supply pipe such that the first inlet and the first outlet are connected to the first processing gas supply pipe; a second processing gas supply pipe connected to the second inlet of the 4-way valve to supply a second processing gas; a bypass connected to the second outlet of the 4-way valve; and a gate valve installed at the bypass.

The invention relates to a multi-shaft extruder for the continuous treatment and/or processing of bulk material, especially a powdery, granular or flocculent product, comprising a plurality of shafts (3) which are arranged in a crown-like manner in a cavity (1) of an extruder housing (2), said shafts extending parallel to the axial direction (A) of the extruder and forming an inner processing chamber (1a) inside the crown, and an outer processing chamber (1b) outside the crown. Each shaft carries a number of axially successive processing elements (4), at least part of the same being elements (4a; 4c; 4e) having a transporting effect, and with which adjacent shafts engage in a sealed manner at least in partial regions. At least one transporting endless screw element (4b; 4d; 4f) comprising at least one transporting screw thread (9, 10; 14, 15, 16; 19, 20) is placed in the region of the supply opening (21) in the extruder housing (2), and does not engage in a sealing manner in at least one partial region along the axial direction (A).

The invention discloses a conical slit-type hot end heat exchanger of a coaxial pulse tube refrigerator and a manufacturing method. The heat exchanger structurally consists of a hot end flange, a conical slit and a hot end plug, wherein the conical slit is inserted into the hot end flange in a tight fit way, the radius of a circle of contact on the top of a cone frustum is equal to the radius of a cold accumulator and the radius of the bottom of the cone frustum is equal to the radius of the hot end plug. The hot end plug and the hot end flange not only can be connected through bolts to form a detachable split-type hot end heat exchanger, but also can be hermetically welded to form an integrated hot end radiator. The conical slit-type hot end heat exchanger has the advantages that the structure is simple, compact and high-efficiency, the hot end radiating capacity of the refrigerator can be exerted to the utmost extent and the hot end pressure ratio of the pulse tube refrigerator is increased at the same time. The structure can intensively realize the major functions of a high-efficiency hot end heat exchanger, a hot end gas flow guide device of the pulse tube refrigerator and a hot end gas even distributor of the cold accumulator, and can improve the performance of the entire pulse tube refrigerator to a great extent.

The invention discloses an integrated slit cold head of a U-shaped pulse tube refrigerating machine and a manufacturing method. The cold head comprises two parts of a top cover and a lower flange, wherein two cylindrical lug bosses protrude below a big lug boss of the top cover, outer diameters of the two cylindrical lug bosses are respectively equal to inner diameters of a cold regenerator and a pulse tube; the two lug bosses integrally cut and penetrate through a slit in parallel horizontally and uniformly; through insertion holes matched with the cylindrical lug bosses of the top cover are arranged on the lower flange, a sealing groove and a location groove matched with the big lug boss of the top cover are cut on the upper surface of the lower flange, the lower flange, the cold regenerator and the pulse tube are hermetically welded to form an assembly; the top cover and the lower flange not only can be connected by bolts to form a detachable split cold head, but also can be hermetically welded to form an integrated cold head. In the invention, the main functions of three parts of an efficient cold end heat exchanger, a pulse tube cold end gas director and a cold regenerator cold end gas distributor can be intensively realized in an integrated slit cold head structure, the overall performance of the U-shaped pulse tube refrigerating machine is enhanced.

The invention discloses a long-path optical fiber-microfluidic chip sensor for detecting absorbance and refraction index, which comprises a microfluidic chip made of a transparent material. A detection passage, an incident optical fiber passage and an emergent optical fiber passage are arranged in the microfluidic chip. The detection passage is provided with a sample inlet, a sample outlet, a light incidence port and a light emergence port. The detection passage is arranged between the incident optical fiber passage and the emergent optical fiber passage. The detection passage, the incident optical fiber passage and the emergent optical fiber passage are mutually isolated. Emergent light from the incident optical fiber passage is absorbed by a sample in the detection passage, is reflected by the inner wall surface of a side wall and then shoots into the emergent optical fiber passage. The incident optical fiber passage and the emergent optical fiber passage are respectively matched with optical fibers which are arranged in the incident optical fiber passage and the emergent optical fiber passage. The end surface of the emergent ends of the optical fibers in the incident optical fiber passage and the end surface of the light emergence port of the incident optical fiber passage are on the same level. The end surface of the emergent ends of the optical fibers in the emergent optical fiber passage and the end surface of the light incidence port of the emergent optical fiber passage are at the same level. The long-path optical fiber-microfluidic chip sensor for detecting absorbance and refraction index can realize high-sensitivity biochemical sensing at low sample consumption.

The invention relates to hydroxy-terminated hyperbranched polyamine-ester polymer and an application thereof in a microfluidic chip. The preparation method of the hydroxy-terminated hyperbranched polyamine-ester polymer comprises the following steps: using equimolar diethanol amine and methyl acrylate to react and obtain N,N-dihydroxyethyl-3-aminomethyl propionate; and using trimethylolpropane and N,N-dihydroxyethyl-3-aminomethyl propionate to react, wherein G2 hydroxy-terminated hyperbranched polyamine-ester polymer, G3 hydroxy-terminated hyperbranched polyamine-ester polymer and G4 hydroxy-terminated hyperbranched polyamine-ester polymer are obtained respectively when the molar ratio of trimethylolpropane to N,N-dihydroxyethyl-3-aminomethyl propionate is 1:9, 1:21 or 1:45. The hydroxy-terminated hyperbranched polyamine-ester polymer is used to prepare the hydrophilic microfluidic chip. The preparation method of the chip comprises the following steps: oxidizing a polydimethylsiloxane (PDMS) microfluidic chip substrate in oxygen atmosphere; and connecting silane coupling agent with the inside of the substrate, and connecting the polymer with silane coupling agent. By strictly controlling the reaction conditions and the molar ratio of reactants, relatively regular polymer can be prepared. The polymer in the invention is used to modify PDMS, thus the hydrophilicity can be maintained permanent, any expensive instrument is not used and the preparation is convenient and fast.

The invention discloses an integrated tapered cold-end heat exchanger for a linear pulse tube refrigerator and a manufacturing method. The heat exchanger mainly comprises a shell, a tapered slit body and a T-shaped guide core column, wherein the shell is a main heat-dispersing surface and a coupled interface, protects the tapered slit body and the T-shaped guide core column and is connected with a regenerator and a pulse tube; the tapered slit body is cut inside the shell by a low-speed wire cutting technology; the T-shaped guide core column is arranged in the center; and a core column slit is cut on the guide core column. According to the heat exchanger, the heat exchanging area is maximized within a limited volume by uniformly cutting the tapered slit in unequal diameters; the cutting way makes a natural transition from a large diameter end to a small diameter end; the thermal resistance and flow loss are minimized; and the gas in the pulse tube is laminarized without an additional gas director. The heat exchanger greatly improves the performance of the whole linear pulse tube refrigerator and is very significant to the practicality of the linear pulse tube refrigerator, aerospace application and other aspects.

A plug unit and system for connecting capillary tubes, especially for high-performance liquid chromatography, with a plug capillary tube projecting through a hole of a plug housing, which is detachably connectable to a bushing unit. The plug capillary tube front end projects into a capillary tube receptacle in the bushing unit with its end face essentially aligned opposite a front end of a bushing capillary tube or a bushing capillary passage opening of the bushing unit, the end face of which is butted against. The plug housing applies a force, with its end face facing the plug capillary tube end, directly or indirectly on an annular sealing element surrounding the plug capillary tube in the region of the front end of the plug capillary tube such that the front end of the plug capillary tube is sealed through deformation of the sealing element against the capillary tube receptacle opening.

Disclosed herein is a compression unit of an orbiting vane compressor having improved tight contact between a circular vane and sealing means wherein the sealing means can be easily manufactured. The compression unit compresses refrigerant gas introduced by an orbiting movement of a circular vane in an annular space defined between the inner wall of a cylinder and an inner ring. The compression unit comprises a first horizontal contact surface formed at the outer circumferential surface of the inner ring, a second horizontal contact surface formed at the inner wall of the cylinder while being parallel with the first horizontal contact surface, and a linear slider disposed in an opening formed at the circular vane for performing a linear reciprocating movement along the first and second horizontal contact surfaces.

The invention relates to a device (1) for filling at least one container (100) with a filling product (110). The device (1) comprises a stationary product tank (2) for receiving the filling product (110), and a rotatable rotor (3) which is connected to a filling element (30) for filling the at least one container (100) with the filling product (110). The rotor (3) is rotatably connected to a line (4) for feeding the filling product (110) to the filling element (30). The line (4) is led into the stationary product tank (2) to direct the filling product (110) of the stationary product tank (2) to the filling element (30).

The connection according to the invention is constituted by two elements, male and female, adapted to fit axially in each other and each comprising a body, inside which a valve is mobile. A fixed part of each element is adapted to displace the mobile valve of the other element when they are being fitted. The female element is provided with a locking member in which may be introduced a part of the male element and which is mobile in translation in a radial direction with respect to the axis of fit of the elements, between two positions in which it respectively allows or opposes the separation of the male and female elements; when these elements are separated, their respective fixed part and mobile valve together define complementary volumes of which the opposite surfaces may come into surface abutment on each other, this avoiding the formation of dead volumes capable of generating drainings or leakages.

Disclosed herein is a compression unit of an orbiting vane compressor having improved tight contact between a circular vane and sealing means wherein the sealing means can be easily manufactured. The compression unit compresses refrigerant gas introduced by an orbiting movement of a circular vane in an annular space defined between the inner wall of a cylinder and an inner ring. The compression unit comprises a first horizontal contact surface formed at the outer circumferential surface of the inner ring, a second horizontal contact surface formed at the inner wall of the cylinder while being parallel with the first horizontal contact surface, and a linear slider disposed in an opening formed at the circular vane for performing a linear reciprocating movement along the first and second horizontal contact surfaces.

An automatic multidimensional gas phase chromatography system is featured as switching mixture sample from precolumn to analysing column by controlling pressure difference between axiliary pressures based on pressure balance principle to have overcome defect of valve leakage and block in normal system. A method utilizing the system to analyse mixture is also disclosed.

A device for mixing at least two media, in particular highly viscous media, having at least one mixing chamber, its volume in a mixer housing being variable by a movable plunger, and having at least one mixing tool. With the aid of an actuator, the mixing tool is insertable into the mixing chamber for mixing the media and is retractable from the mixing chamber following the mixing.

The invention discloses a pulse electrospray ion source, a pulse sample injection method and a mass spectrum detection system. The ion source comprises a sample supply appliance, a sample injection capillary tube and an electrode, and a sample solution provided by the sample supply appliance enters from the sample injection end of the sample injection capillary tube and is output from the output end of the sample injection capillary; the electrode electrifies the sample solution so as to provide voltage required for forming electrospray; the ion source also comprises a moving device coupled tothe sample supply appliance or the sample introduction capillary, during sample injection, the sample supply device and the sample injection capillary tube intermittently move relative to each otheraccording to a set pulse time sequence, so that a sample in the sample supply device is intermittently contacted with the sample injection end of the sample injection capillary tube, and pulse type electrospray sample injection is realized. According to the invention, pulse sample injection and ionization are synchronously carried out, and the sample utilization rate is improved.

The invention belongs to the technical field of chemical testing, and particularly relates to a catalyst testing system, which includes a gas supply device, a sample feeding device, a separation reaction device, and a liquid sample detector. Before entering the detector, it is easy to cause the problem of gas-liquid mixing affecting the test effect. It has the beneficial technical effects of good test effect, prevention of condensation, avoiding dead volume, precise control of water content in the gas, and less water content of the sample after separation.

The invention discloses an implementation method for a channel type cold end heat exchanger of a gas coupling pulse tube refrigerator. The channel type cold end heat exchanger comprises a first heat exchanger outer shell, a second heat exchanger outer shell, a first conical slit body, a second conical slit body, a first through hole, a second through hole, a first laminar flow element, a second laminar flow element, a third laminar flow element, a first channel, a second channel and a plug, conical slits are cut in the left heat exchanger outer shell and the right heat exchanger outer shell respectively, and channels are formed in the heat exchangers, so that connection among a first-stage regenerator, a second-stage regenerator and a first-stage pulse tube is achieved. The channel type cold end heat exchanger of the gas coupling pulse tube refrigerator and the implementation method realize efficient matching of front-and-rear-stage cold fingers of the pulse tube refrigerator while maintaining the high-efficiency heat exchange advantage of a traditional heat exchanger, inhibit the backflow, mixed flow and turbulence disturbance of the gas working medium in the heat exchange channel, and ensure the uniformity of gas flow. According to the channel type cold end heat exchanger of the gas coupling pulse tube refrigerator and the implementation method, the heat exchange efficiency and the overall performance of the refrigerating machine are remarkably improved, and the channel type cold end heat exchanger has very positive significance in the aspect of achieving compactness and practicability of the multi-stage pulse tube refrigerating machine.