Method for cleaning ALD source steel cylinder

Abstract

The invention discloses a method for cleaning an ALD source steel cylinder. The method for cleaning the ALD source steel cylinder comprises the following steps: (1) in a water-free and oxygen-free glove box, adding anhydrous alkane into the ALD precursor source steel cylinder for cleaning; (2) fully filling the steel cylinder cleaned in the step (1) with the anhydrous alkane, and carrying out ultrasonic cleaning; (3) moving the steel cylinder out of the glove box, and cleaning with an organic solvent-alkali system, an acid solution system and an ultrapure water system in sequence; and (4) fully filling the cleaned steel cylinder with ultrapure water, standing, carrying out ICP-OES detection, and drying for later use after the detection is qualified. By means of the cleaning method, precursors, oil substances, oxide impurities and metal impurity particles in the ALD precursor source steel cylinder can be cleaned, the ALD source filling requirement is met, the method is simple to operate, the cleaning process is safe and easy to operate, the cleaning raw materials are low in cost and short in period, and the requirements for purifying, filling and producing the steel cylinder can be rapidly provided.

Description

technical field [0001] The invention relates to a chemical process method, in particular to a cleaning method for an ALD source steel cylinder. Background technique [0002] As the key precursor material of atomic layer deposition technology, ALD source can deposit TiN and TiO 2 、TaN x , HfO 2 , ZrO 2 , HfZr x o y , La 2 o 3 and other types of film. These new materials have a wide range of applications in high-K gate oxide layers, storage capacitive electrolytes, special fiber doping, optical thin films, solar cells and other fields. [0003] The ALD source steel cylinder, as the precursor transportation system of atomic layer deposition technology, provides a 6N ALD source; in order to prevent the remaining source residue from polluting the steel cylinder and the cylinder valve during the treatment process, it is particularly important to study how to deal with and clean the steel cylinder. [0004] At present, the cylinder cleaning process is emptying the residual...

AI Technical Summary

Problems solved by technology

[0004] At present, the cylinder cleaning process is emptying the residual liquid, opening oxidation, alkali washing, pickling, and ultrapure water washing. Such precursors, the oxidation process will form a dense oxide film inside the steel cylinder and the valve core, which is difficult to clean. It will pollute the high-purity ALD precursor during filling and affect downstream applications such as film deposition.