Method for manufacturing planar micro-fluidic chip based on ink-jet printing

Abstract

The invention discloses a method for manufacturing a planar micro-fluidic chip based on ink-jet printing, and belongs to the fields of material surface treatment, microelectronic equipment and biochemical detection, and solves the problems of complex process, high cost and poor durability of the chip in the preparation process of the existing planar micro-fluidic chip. The method comprises the following steps: cleaning and drying a substrate; polishing the dried substrate and performing ultrasonic cleaning with deionized water; putting the ground substrate and one or more of deionized water, ammonia water, a 0.1-5M sodium hydroxide solution and a 0.1-5M potassium hydroxide solution into a polytetrafluoroethylene closed container for hydro-thermal treatment, taking out the substrate after time t, and drying the substrate at constant temperature to obtain a substrate with a nano coarse structure; preparing a super-hydrophobic pattern on the substrate through a micro-piezoelectric ink-jet printer; and after the substrate is printed, performing constant-temperature drying to obtain the planar micro-fluidic chip with the channel. The method is suitable for the technical field of material surface treatment.

Description

technical field

[0001] The invention belongs to the fields of material surface treatment, microelectronic equipment and biochemical detection. Background technique

[0002] In order to reduce the complexity of the equipment required for biochemical detection in the fields of medical treatment and environmental protection, and realize biochemical experiments anytime and anywhere, biochemical detection chips have become a research hotspot. The biochemical detection chip is the miniaturization, integration and automation of experimental equipment, which can concentrate the functions of sample preparation, separation and detection in the analysis laboratory on one chip. As an important branch of lab-on-a-chip, microfluidic chips based on microfluidic technology can make liquids react in micron-scale channels, and have the characteristics of less sample consumption, high throughput, fast speed, and no cross-contamination.

[0003] Microfluidic chips are widely used and have been...

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