High-temperature sensor for melt in furnace under clean environment condition

A high-temperature sensor, environmental condition technology, applied in instruments, thermometers, scientific instruments, etc., can solve problems such as melt temperature problems, improve mechanical properties and thermal shock resistance, low cost, good strength and thermal shock resistance Effect

Active Publication Date: 2022-02-18
陕西天若机电有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the process of indirect measurement, because the melt is affected by the on-site environment, intermediate medium, atmosphere, etc., it brings troubles to accurately measure the temperature of the melt in the furnace

Method used

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  • High-temperature sensor for melt in furnace under clean environment condition
  • High-temperature sensor for melt in furnace under clean environment condition
  • High-temperature sensor for melt in furnace under clean environment condition

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0066] A method for preparing a corundum composite phase material, comprising:

[0067] Step 1, mix corundum, alumina, niobium telluride, yttrium aluminate, and binder evenly, and the mass ratio of corundum, alumina, niobium telluride, yttrium aluminate, and binder is 100:8:1.2:0.8:5 , wherein the binding agent comprises a concentration of 5wt% polyvinyl alcohol solution to obtain a mixture;

[0068] Step 2, trapping the mixture for 24 hours;

[0069] Step 3, compressing the trapped material under a pressure of 150 MPa to obtain a green body;

[0070] Step 4, drying the green body at 100°C for 24 hours to obtain a precursor;

[0071] Step 5, put the precursor in the sintering furnace for sintering, and prepare the sintering temperature as follows: raise the temperature at 7.5°C / min to 180°C, and keep it for 45 minutes; raise the temperature at 12°C / min to 380°C, and keep it for 20 minutes; To 1740°C, keep warm for 150min;

[0072] Step 6. After the sintering is completed, ...

Embodiment 2

[0074] A method for preparing a corundum composite phase material, comprising:

[0075] Step 1, mix corundum, alumina, niobium telluride, yttrium aluminate, and binder evenly, and the mass ratio of corundum, alumina, niobium telluride, yttrium aluminate, and binder is 100:10:0.5:0.5:3.5 , wherein the binding agent comprises a concentration of 4wt% polyvinyl alcohol solution to obtain a mixture;

[0076] Step 2, trapping the mixture for 48 hours;

[0077] Step 3, compressing the trapped material under a pressure of 100 MPa to obtain a green body;

[0078] Step 4, drying the green body at 120°C for 20 hours to obtain a precursor;

[0079] Step 5, put the precursor in a sintering furnace for sintering, and prepare the sintering temperature as follows: raise the temperature at 10°C / min to 200°C, and keep it for 30 minutes; raise the temperature at 10°C / min to 400°C, and keep it for 12 minutes; To 1740°C, keep warm for 180min;

[0080] Step 6. After the sintering is completed, ...

Embodiment 3

[0082] A preparation method of corundum composite phase material, the difference from Example 1 is:

[0083] In step 1, the bonding agent includes polyvinyl alcohol solution with a concentration of 4wt% and beryllium metaaluminate, and the amount of beryllium metaaluminate is 1wt% of corundum.

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Abstract

The invention discloses a high-temperature sensor for melt in a furnace under a clean environment condition, and belongs to the technical field of high-temperature sensors. The sensor comprises a temperature sensing element, a long insulating sleeve, a long protective tube, a T-shaped flange plate and a temperature conversion module. The front end of the long protective tube is sealed, the long insulating sleeve is packaged in the long protective tube, the inner side of the rear end of the long protective tube is connected with the long insulating sleeve, the temperature sensing element is installed in a through hole of the long insulating sleeve, the front end of the temperature sensing element is in contact with or not in contact with the interior of the front end of the long protective tube, the rear end of the temperature sensing element is connected with the temperature conversion module, the outer side of the rear end of the long protection tube is sleeved with the T-shaped flange plate, and when the high-temperature sensor works, the long protection tube is immersed in high-temperature melt to sense the temperature or is not immersed in the high-temperature melt to sense the silicon steam temperature. The high-temperature sensor can directly measure clean melt in the single crystal furnace, and has the advantages of high precision, high temperature resistance, corrosion resistance, good thermal shock resistance, low cost and the like.

Description

technical field [0001] The invention belongs to the technical field of high-temperature sensors, and in particular relates to a high-temperature sensor facing molten liquid in a clean environment in a furnace. Background technique [0002] In the microelectronics industry, the base material of semiconductor devices generally adopts single crystals, and single crystals are mainly grown by the Czochralski method under high-temperature environmental conditions in single crystal furnaces without dislocations. As an important parameter for single crystal growth, temperature mainly determines whether the crystal can be formed. A reasonable and stable temperature field distribution can ensure the production of high-quality single crystals, otherwise it will cause various defects during the single crystal growth process and affect the quality. Research and develop a high-temperature sensor that can directly measure the temperature of the material melt under the clean environment con...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): G01K1/12C04B35/10C04B35/64
CPCG01K1/12C04B35/10C04B35/64C04B2235/96C04B2235/95C04B2235/446C04B2235/3222C04B2235/6562C04B2235/6567C04B2235/9607
Inventor张旭
Owner陕西天若机电有限公司