Piezoelectric ceramic driving type deformable reflector and manufacturing method thereof

Abstract

The invention discloses a piezoelectric ceramic driving type deformable mirror and a manufacturing method thereof, and aims to solve the problems of difficulty in driver scale expansion, reliability reduction, surface shape high-order error increase and the like of an existing deformable mirror. According to the piezoelectric ceramic driving type deformable reflector and the manufacturing method thereof, the driver scale can be expanded, the reliability is high, and the high-order error is small. The deformable mirror mainly comprises an integral mirror surface (1), a modularized piezoelectric ceramic driver array (2), a high-rigidity base (3), an electrical connection module (4) and a mechanical shell (5), and is a wavefront corrector which takes the mechanical shell as a connection mechanism, the high-rigidity base (3) as a position reference, the modularized piezoelectric ceramic driver array (2) as a driving mechanism and the integral mirror surface (1) as a reflecting surface. Based on the invention, the piezoelectric ceramic driving type deformable reflecting mirror which takes an integral mirror surface and a linear array driving unit module splicing type driver array as a core is developed, and the piezoelectric ceramic driving type deformable reflecting mirror has the capability of meeting the requirements of advanced adaptive optical systems in the future.

Description

technical field [0001] The invention belongs to the technical field of adaptive optical wavefront correctors, in particular to a piezoelectric ceramic driven deformable mirror and a manufacturing method thereof. Background technique [0002] As the executive device of adaptive optics system, the main function of deformable mirror is to generate controlled deformation, and its performance directly determines the capability limit of adaptive optics system, which is the key to the dynamic and variable characteristics of adaptive optics system. With the development of astronomy, new high-resolution observation requirements, such as extended targets such as nebulae and the sun, low-contrast targets such as terrestrial planets, and weak targets such as faint galaxies in the early universe, exceed the traditional SCAO (Single-layer Conjugate Correction Adaptive Adaptive) Optical) system observation capabilities, promote adaptive optics technology to derive MCAO (multi-layer conjuga...

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