The invention relates to the technical field of
wafer carrying, in particular to
wafer multi-piece type mechanical arm carrying equipment which comprises an X-axis
transplanting platform arranged in an equipment body, the upper surface of the X-axis
transplanting platform is connected with a protective shell, and two sets of symmetrically-arranged
servo motors are fixedly installed in the protective shell; a synchronous wheel set is fixedly installed at the output end of each
servo motor, a
ball screw is inserted into the other end of each synchronous wheel set, two symmetrically-arranged connecting plates are connected to the surface of each
ball screw in a meshed mode, material taking plates are fixedly installed at the
tail ends of the multiple connecting plates, and a center plate is arranged in the middle of the multiple material taking plates. And the center plate is fixedly mounted on the surface of the protective shell. Through cooperative use of all parts, multiple groups of wafers can be carried at a time, wafers of different specifications can be carried, and the purposes of accelerating the carrying period and improving the carrying efficiency are achieved.