Device for fixing a flat object, in particular a substrate, to a work surface by means of low pressure

A technology for fixing a plane and a working surface, which is applied in the field of substrate devices

Active Publication Date: 2010-06-16
库力科及索法模压焊接有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, such devices are not suitable for the processing of substrates that completely cover the working surface, which is typical for chip loaders, for example.

Method used

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  • Device for fixing a flat object, in particular a substrate, to a work surface by means of low pressure
  • Device for fixing a flat object, in particular a substrate, to a work surface by means of low pressure
  • Device for fixing a flat object, in particular a substrate, to a work surface by means of low pressure

Examples

Experimental program
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Effect test

Embodiment Construction

[0020] as by figure 1 and figure 2 It can be seen that the device generally marked with 1 mainly consists of a support plate 5 , for example made of glass and other transparent or partially transparent materials. The carrier plate has an approximately rectangular plane with a working surface 4 which can be provided, for example, with an electrically conductive layer 19 . The support plate 5 is slightly inclined on both long sides. This inclination facilitates the introduction or removal of the substrate which moves linearly in the direction of the arrow a. A light-reflecting structure 7 having a plurality of bowl-shaped pits is arranged on the back side 6 of the support plate 5 . Furthermore, the support plate is penetrated by a plurality of vacuum channels 8 , which terminate at holes 20 in the working surface 4 .

[0021] The carrier plate 5 rests on a plate base 14 and is detachably connected thereto by means of clamping elements 12 . The clamping part made of metal u...

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PUM

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Abstract

The invention relates to a device (1) for fixing a flat object, in particular a substrate (2), to a work surface (4) by means of low pressure. Said device comprises a supporting plate (5) which is atleast partially transparent and whereby one of the sides forms the work surface and said supporting plate comprises a rear side which is arranged at a distance in relation to the work surface and which has a radiation-reflecting structure (7). Said supporting plate also comprises low pressure channels which can be connected to a low pressure line and which lead into the work surface. At least onelight source (10) is provided in order to illuminate the substrate in transmitted light in the most homogenous manner possible, and the radiation thereof can be injected into the supporting plate. Thework surface co-operates, preferably, with a heating device (11) such that the substrate (2) can be heated.

Description

technical field [0001] The invention relates to a device for fixing planar objects, in particular substrates, on a work surface by means of negative pressure. Background technique [0002] Devices of this type, also known as frame support plates (vacuum chucks), were first used in the semiconductor industry for the precise fixing and positioning of substrates for defined processing processes relative to tools. Thus, for example, during the production of semiconductor components, the silicon chips of the fully processed wafers must be removed by means of so-called chip loaders and placed precisely on lead frames or strips and permanently connected to the substrate. In order to maintain a high positioning accuracy and for other purposes, an image processing system is provided, by means of which the target placement position of the chip can be ascertained from the markings on the substrate. However, the image processing system can additionally also be used to inspect the worki...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25B11/00
CPCB25B11/005Y10T29/53265Y10T29/53191Y10T29/53091H01L21/68H01L21/00H01L21/687H01L21/683
Inventor J·舒斯特
Owner 库力科及索法模压焊接有限责任公司
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