Alignment device for planar element, manufacturing equipment for the same, alignment method for the same, and manufacturing method for the same
A technology for manufacturing devices and alignment devices, which is applied in semiconductor/solid-state device manufacturing, photolithography on patterned surfaces, and instruments, and can solve problems such as increased cost on the device side and deterioration of accuracy
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[0062] Hereinafter, embodiments of the present invention will be described with reference to the drawings. figure 1 is a block diagram of an embodiment of the alignment device. figure 1 is a block diagram of an embodiment of the alignment device. The alignment device 10 is a device for aligning a planar body 2 , which is a planar object such as a plate or a sheet, placed along the illustrated XY plane with respect to a predetermined reference position.
[0063] The alignment device 10 has: an imaging unit 11, which photographs a predetermined alignment mark M provided on the surface of the planar body 2; a position detection unit 12, which detects the position of the alignment mark M based on the image obtained by the imaging unit 11; position adjustment part 13, which adjusts the relative position between the reference position and the planar body 2 according to the position of the alignment mark M detected by the position detection part 12; The orientation of the planar bo...
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