Method and device for vaporizing hydrogen chloride in tail gas in polycrystalline silicon production

A technology of hydrogen chloride and polysilicon, which is applied in the direction of chemical instruments and methods, separation methods, and dispersed particle separation, etc., can solve the problems of large power consumption, difficulty in stably controlling the purity of hydrogen chloride, loss, etc., achieve good vaporization effect, save equipment costs and The effect of power consumption

Active Publication Date: 2011-05-04
XINTE ENERGY
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Problems solved by technology

The traditional method is to heat and vaporize hydrogen chloride through an electric heater, which not only consumes a large amount of electric energy, but also makes it difficult to control the purity of hydrogen chloride stably, and makes the cooling capacity of the material unable to be recovered and a large amount of loss

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  • Method and device for vaporizing hydrogen chloride in tail gas in polycrystalline silicon production
  • Method and device for vaporizing hydrogen chloride in tail gas in polycrystalline silicon production

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Embodiment Construction

[0013] see figure 1 , a device for hydrogen chloride in the vaporized tail gas in polysilicon production, including a hydrogen chloride condensation storage tank 1, a heat exchanger 2 and a demister 3 connected in sequence, and a chlorosilane storage tank 4 connected to it is arranged below the heat exchanger 2 for storage. A small amount of chlorosilane liquid separated from liquid hydrogen chloride.

[0014] First, transfer the low-temperature hydrogen chloride liquid from the top of the hydrogen chloride separation tower to the hydrogen chloride condensation storage tank 1, and pass the low-temperature hydrogen chloride liquid in the hydrogen chloride condensation storage tank 1 and the high-temperature chlorosilane liquid separated from the bottom of the hydrogen chloride separation tower through a heat exchanger 2 After heat exchange, the low-temperature hydrogen chloride liquid is vaporized and separated from a small amount of chlorosilane liquid entrained in it, and the...

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Abstract

The invention discloses a method and a device for vaporizing hydrogen chloride in tail gas in polycrystalline silicon production. The method is characterized in that: low-temperature hydrogen chloride liquid separated from the top of a hydrogen chloride separating tower exchanges heat with high-temperature chlorosilane liquid output from the bottom of the hydrogen chloride separating tower through heat exchange equipment, so that the low-temperature hydrogen chloride liquid absorbs the heat and is completely vaporized, the temperature of high-temperature chlorosilane is reduced, and chlorosilane serving as low-temperature absorption liquid enters an absorption tower to continuously absorb the hydrogen chloride in the tail gas. The device comprises a hydrogen chloride condensation storage tank, a heat exchanger and a demister, wherein a chlorosilane storage tank is arranged below the heat exchanger and connected with the heat exchanger. Heat quantity and cold quantity in a tail gas recovery system are mutually converted, so that energy is fully utilized and saved.

Description

technical field [0001] The invention relates to a method for recovering and treating tail gas produced in the industrial production of polysilicon, and more specifically relates to a method for recovering hydrogen chloride from the tail gas produced in the production of polysilicon. Background technique [0002] In polysilicon production, an important process that can recycle polysilicon production tail gas is the dry tail gas recovery system. The tail gas recovery process can recycle hydrogen, and can separate chlorosilane and hydrogen chloride in the tail gas. [0003] The main component of tail gas in polysilicon production is a large amount of hydrogen, which contains a small amount of chlorosilane and hydrogen chloride. The process is mainly through condensation, compression, absorption, desorption and adsorption processes to achieve separation and return to the device for use. The separation and recovery of hydrogen chloride can only be separated through the absorptio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/18
Inventor 陈朝霞王立春李长生黄杨陈喜清
Owner XINTE ENERGY
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