Calibration device for piezo actuators

Abstract

The invention relates to a calibration device of a piezoelectric actuator, comprising a light source; and optical fiber I, a convex lens A and a spectroscope which are arranged along the direction of the emitting light path of the light source, wherein a reference mirror is arranged on the emitting end at one side of the spectroscope, and the piezoelectric actuator to be tested is arranged at the other side of the spectroscope. The piezoelectric actuator to be tested is connected with a direct current power supply, of which amplitude value can be adjusted. A convex lens B is arranged on the emitting end of the spectroscope, the convex lens B is connected to a broadband spectrograph through optical fiber II, and the broadband spectrograph is connected with a computer which can collect and process the data. The device can directly measure the displacement by changing the voltage applied to the piezoelectric actuator and can realize the nano-scale or micron-scale detection.

Description

technical field [0001] The invention belongs to the technical field of performance testing and calibration of piezoelectric ceramic drivers, in particular to an online calibration detection device for piezoelectric drivers. Background technique [0002] The length of the piezoelectric actuator will elongate or shorten with the change of the applied voltage, and its deformation can be on the micron or nanoscale; at present, the piezoelectric actuator has been widely used in optical systems, precision instruments, micro-mechanical electronics Technology and other measurement and control fields, so the measurement of piezoelectric actuator characteristics is particularly important, which can not only study the piezoelectric mechanism of materials, but also improve the accuracy of its drive, thereby improving the accuracy of measurement and control. [0003] The existing methods for calibrating the performance of piezoelectric actuators mainly include optical interferometry, las...

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Problems solved by technology

[0003] The existing methods for calibrating the performance of piezoelectric actuators mainly include optical interferometry, laser Doppler velocimetry, etc.; the accuracy of optical interferometry can reach a very high resolution in the depth direction (10-12m), but due to the uncertainty of phase , its detection range is limited to 1 / 4 wavelength of the light source; although its detection range can be extended by phase modulation technology, but this will increase the complexity of calculation and reduce the accuracy of the test; in addition, laser Doppler velocity measurement The instrument can directly test the motion speed of the object to be measured, and the displacement of the object to be measured is obtained by integrating the motion speed, so the integral error will reduce the detection accuracy

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