Polishing device and polishing method of aspheric optical element

An optical element and polishing device technology, applied in optical surface grinders, grinding/polishing equipment, metal processing equipment, etc., can solve the problems of difficult processing of aspherical optical elements and the inability of polishing tools to match the workpiece, and achieve the surface of the workpiece to be processed. The effect of uniformity, improved material removal rate and high surface shape accuracy

CN102922389AInactive Publication Date: 2013-02-13XIAMEN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2013-02-13
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a polishing device and a polishing method of an aspheric optical element, and relates to a polishing device of machining. The polishing device is provided with a base, a work bench rotating drive motor, a work bench reversing drive motor, a work bench rotating shaft, a tri-axial linear motor, a tri-axial lead rail, a work bench reversing shaft, a work bench base, a work bench, an upright post, a beam, a Z-axis base, an air bag tool and a control system. The polishing method comprises the following steps: finishing the polishing of a point on the aspheric optical element and other points on a girdle band by the air bag tool by matching with rotation of the work bench in a two-axis linkage manner; stopping rotating the work bench, controlling the Z-axis linear motor and the work bench reversing drive motor, thus rotating the normal directions of upper and lower polishing points of the element to a vertical direction, calculating the length of the air bag tool needing to be fed on an X-axis direction, and calculating through an X-axis linear motor, and controlling the Z-axis linear motor to downwards drive the air bag tool to match with rotation of the work bench so as to polish the upper and lower polishing points of the element and other points on the girdle band in the two-axis linkage manner.
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Description

technical field

[0001] The invention relates to a machining polishing device, in particular to a polishing device and a polishing method for an aspheric optical element. Background technique

[0002] Aspherical optical elements have the advantages of correcting aberrations, simplifying the system, and improving the precision of the optical system. Laser nuclear fusion devices, high-energy lasers, infrared thermal imaging, and optical systems for satellites all have great demands on high-precision aspheric components. However, since the final molding of large-aperture aspheric optical elements needs to go through several cold working processes such as grinding, grinding and polishing, each process will have different effects on the surface quality of optical elements. Therefore, obtaining high-precision aspheric optical elements has become a difficult problem for scholars at home and abroad. As the last process of cold processing of optical components, precision polishing h...

Examples

Embodiment Construction

[0028] The technical solution of the present invention will be further elaborated below in conjunction with the accompanying drawings.

[0029] The technical solution of the present invention is described below by taking the polishing of an axisymmetric aspheric surface as an example. Of course, the present invention is not limited to the polishing of an axisymmetric aspheric optical element, and can be extended according to the processing needs of different workpieces.

[0030] Due to the rotational symmetry of the axisymmetric aspheric optical element and the rotatable workbench of the polishing device of the present invention, the airbag tool only needs to walk half of a generatrix of the axisymmetric aspheric optical element to process the workpiece.

[0031] see figure 1 and 2 , the embodiment of the present invention is provided with a base 13, a workbench rotation drive motor 14, a workbench turning drive motor 15, a workbench rotation shaft 17, a Y-axis linear motor 1...