Arc ion iron plating magnetic composite structural target and application thereof
An arc ion plating and composite structure technology, applied in ion implantation plating, sputtering plating, vacuum evaporation plating and other directions, can solve the problems of reducing the service life of the target material, complex structure, unfavorable industrial application promotion, etc. Simple, low cost, and the effect of solving the problem of arc running and arc breaking
Active Publication Date: 2013-04-03
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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However, these solutions also have shortcomings: or reduce the service life of the target; or add additional structures or functional units, the structure is more complex, which is not conducive to industrial application promotion
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[0032] Below in conjunction with accompanying drawing and embodiment the present invention will be further described:
[0033] Such as Figure 4 As shown, the arc ion plating ferromagnetic composite target of the present invention is composed of a soft magnetic material target shell 4 and a magnetic material target 2 with high magnetic permeability.
[0034] The inner diameter of the target shell 4 is slightly larger than the outer diameter of the magnetic material target 2, and the two are fixed by threads, or the two parts of the composite target can be fixed by bolts.
[0035] The metal target shell 4 has the characteristics of high magnetic permeability, and the forced magnetic force lines pass through the surface of the ferromagnetic target (such as figure 2 As shown), the magnetic field distribution on the surface of the cathode target is improved, thereby solving the problem of "arc running" that occurs when the magnetic target 2 is lower than the Curie temperature at...
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The invention belongs to the field of film preparation, and particularly relates to an arc ion iron plating magnetic composite structural target and an application thereof. The composite structural target comprises a soft magnetic material target casing with high magnetic conductivity and a ferro magnetic material target, wherein the ferro magnetic material target is connected with the soft magnetic material target casing. The composite structural target can be used for solving the problem that the service life of the target is reduced when grooves are additionally formed on the surface of the ferro magnetic material target so as to overcome magnetic shading, and further solving the problems that equipment is complex to operate and the cost is increased because the coupled magnetic field is added in a deposition system so as to change the distribution of target surface magnetic lines of force.
Description
technical field [0001] The invention belongs to the field of thin film preparation, in particular to an arc ion plating ferromagnetic composite structure target material and its application. Background technique [0002] Arc ion plating (AIP) technology is an ion plating technology that uses a cathodic arc evaporation source. The vacuum system is fed with argon to 1-10 -1 At Pa, an arc discharge is initiated between the cathode target and the anode vacuum chamber and a high-density metal vapor plasma is generated. As electrons fly away from the cathode region rapidly, the positive charge density near the target increases. In the arc spot stable etching stage, after the electric field intensity formed by positive ions increases to a critical value, the emission of cathode electrons is continuously promoted, the ohmic heating effect of the current is increased, and the evaporation ionization rate is further improved; at the same time, the strong electric field is the Positi...
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IPC IPC(8): C23C14/32
Inventor 孙超常正凯肖金泉宫骏华伟刚陈育秋
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI