A kind of arc ion plating ferromagnetic composite structure target material and its application

Abstract

The invention belongs to the field of film preparation, and particularly relates to an arc ion iron plating magnetic composite structural target and an application thereof. The composite structural target comprises a soft magnetic material target casing with high magnetic conductivity and a ferro magnetic material target, wherein the ferro magnetic material target is connected with the soft magnetic material target casing. The composite structural target can be used for solving the problem that the service life of the target is reduced when grooves are additionally formed on the surface of the ferro magnetic material target so as to overcome magnetic shading, and further solving the problems that equipment is complex to operate and the cost is increased because the coupled magnetic field is added in a deposition system so as to change the distribution of target surface magnetic lines of force.

Description

technical field [0001] The invention belongs to the field of thin film preparation, in particular to an arc ion plating ferromagnetic composite structure target material and its application. Background technique [0002] Arc ion plating (AIP) technology is an ion plating technology that uses a cathodic arc evaporation source. The vacuum system is fed with argon to 1-10 -1 At Pa, an arc discharge is initiated between the cathode target and the anode vacuum chamber and a high-density metal vapor plasma is generated. As electrons fly away from the cathode region rapidly, the positive charge density near the target increases. In the arc spot stable etching stage, after the electric field intensity formed by positive ions increases to a critical value, the emission of cathode electrons is continuously promoted, the ohmic heating effect of the current is increased, and the evaporation ionization rate is further improved; at the same time, the strong electric field is the Positi...

Images